26 February 2016 Dynamic specular surface measurement based on color-encoded fringe reflection technique
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Abstract
A color-encoded fringe reflection technique is presented for dynamic specular surface measurement. Only one color-encoded fringe pattern is required in this method. In comparison with the reported dynamic specular surface measuring method (the composite fringe pattern method), the proposed color-encoded fringe technique has higher phase accuracy. The color intensity crosstalk problem between the three channels is discussed. As a result, this problem will seldom affect the phase accuracy of the proposed method. This turns out to be the main reason why the presented method can achieve a higher measuring accuracy than the existing dynamic measurement method. In addition, the proposed color-encoded fringe technique is proven to be more suitable than the existing method for the complex tested surface. The vibrating measuring experiment of a wafer proves the ability of the proposed method to achieve dynamic measurement.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Yuxiang Wu, Yuxiang Wu, Huimin Yue, Huimin Yue, Jingya Yi, Jingya Yi, Mingyang Li, Mingyang Li, Yong Liu, Yong Liu, } "Dynamic specular surface measurement based on color-encoded fringe reflection technique," Optical Engineering 55(2), 024104 (26 February 2016). https://doi.org/10.1117/1.OE.55.2.024104 . Submission:
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