9 August 2016 Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator
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Abstract
Although slot waveguide structures are widely used in all kinds of optical devices, very few articles focus on the issue of optical isolation of slot waveguides. This article, in an effort to bridge the gap in the available literature, focuses on the aspect of optical isolation of slot waveguides and provides definitive rules for application of different slot waveguides in dense integration of optical links. A slot waveguide with a 48-nm-wide slot was fabricated with electron beam lithography and inductively coupled plasma etching.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Zengzhi Huang, Zengzhi Huang, Jinsong Xia, Jinsong Xia, } "Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator," Optical Engineering 55(8), 087102 (9 August 2016). https://doi.org/10.1117/1.OE.55.8.087102 . Submission:
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