Infrared properties of sol–gel derived zirconia film

Itsunari Yamada; Hiroki Torii; Yoshiro Ishihara

doi:10.1117/1.OE.56.7.077104

12 July 2017 Infrared properties of sol–gel derived zirconia film

Itsunari Yamada, Hiroki Torii, Yoshiro Ishihara

Author Affiliations +

Optical Engineering, Vol. 56, Issue 7, 077104 (July 2017). https://doi.org/10.1117/1.OE.56.7.077104

Abstract

We examined infrared transmission characteristics of a sol–gel derived zirconia film and the antireflective(AR) effect of this film for an Si substrate in the midinfrared region. The surface reflection loss of an Siplate is high (∼30%) because of the high refractive index (3.42) in the infrared region. We employed zirconiananoparticle dispersion with 15 wt. % (1-butanol solvent) as starting sol solution. Then, the dispersion wascoated with Si substrate at a spin-coating speed of 2000 rpm, and the substrate was heated to 150°C. Thenumber of coatings was repeated seven times. As a result, the transmittance at 5.6-μm wavelength wasenhanced to 66.2%, and we found that the coated film worked efficiently as the AR film up to 10-μm wavelength.Additionally, by heating the substrate to 800°C, the large absorptions at 2.9-, 6.4-, and 6.9-μm wavelengths couldbe suppressed because the hydroxy group in the film was reduced. Its peak transmittance was 67.9% at 4.9-μmwavelength.

Citation Download Citation

Itsunari Yamada, Hiroki Torii, and Yoshiro Ishihara "Infrared properties of sol–gel derived zirconia film," Optical Engineering 56(7), 077104 (12 July 2017). https://doi.org/10.1117/1.OE.56.7.077104

Received: 10 March 2017; Accepted: 21 June 2017; Published: 12 July 2017

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