24 February 2017 Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip
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Abstract
Displacement sensor is one of the most important measuring instruments in many automated systems. We demonstrated an integrated optical displacement sensor based on an asymmetric Mach–Zehnder interferometer chip on a flexible substrate. The sensing chip was made of polymer materials and fabricated by lithography and lift-off techniques. Measured results show that the device has a loss of less than 5 dB and a potential sensitivity of about 0.105    rad / μ m with quite a large space for promotion. The sensor has advantages of antielectromagnetic interference, high reliability and stability, simple preparing process, and low cost; it will occupy an important place in displacement sensors.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Ning Zhao, Ning Zhao, Guang Qian, Guang Qian, Xing-Chang Fu, Xing-Chang Fu, Li-Jiang Zhang, Li-Jiang Zhang, Wei Hu, Wei Hu, Ruo-Zhou Li, Ruo-Zhou Li, Tong Zhang, Tong Zhang, } "Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip," Optical Engineering 56(2), 027109 (24 February 2017). https://doi.org/10.1117/1.OE.56.2.027109 . Submission: Received: 27 October 2016; Accepted: 6 February 2017
Received: 27 October 2016; Accepted: 6 February 2017; Published: 24 February 2017
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