12 July 2017 Infrared properties of sol–gel derived zirconia film
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We examined infrared transmission characteristics of a sol–gel derived zirconia film and the antireflective (AR) effect of this film for an Si substrate in the midinfrared region. The surface reflection loss of an Si plate is high (∼30%) because of the high refractive index (3.42) in the infrared region. We employed zirconia nanoparticle dispersion with 15 wt. % (1-butanol solvent) as starting sol solution. Then, the dispersion was coated with Si substrate at a spin-coating speed of 2000 rpm, and the substrate was heated to 150°C. The number of coatings was repeated seven times. As a result, the transmittance at 5.6-μm wavelength was enhanced to 66.2%, and we found that the coated film worked efficiently as the AR film up to 10-μm wavelength. Additionally, by heating the substrate to 800°C, the large absorptions at 2.9-, 6.4-, and 6.9-μm wavelengths could be suppressed because the hydroxy group in the film was reduced. Its peak transmittance was 67.9% at 4.9-μm wavelength.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Itsunari Yamada, Itsunari Yamada, Hiroki Torii, Hiroki Torii, Yoshiro Ishihara, Yoshiro Ishihara, } "Infrared properties of sol–gel derived zirconia film," Optical Engineering 56(7), 077104 (12 July 2017). https://doi.org/10.1117/1.OE.56.7.077104 . Submission: Received: 10 March 2017; Accepted: 21 June 2017
Received: 10 March 2017; Accepted: 21 June 2017; Published: 12 July 2017

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