12 September 2017 Optical path difference measurements with a two-step parallel phase shifting interferometer based on a modified Michelson configuration
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Abstract
We report an optical implementation of a parallel phase-shifting quasi-common path interferometer using two modified Michelson interferometers to generate two interferograms. By using a displaceable polarizer’s array, placed on the image plane, we can obtain four phase-shifted interferograms in two captures. The system operates as a quasi-common path interferometer generating four beams, which are to interfere with alignment procedures on the mirrors of the Michelson configurations. The optical phase data are retrieved using the well-known four-step algorithms. To present the capabilities of the system, experimental results obtained from transparent structures are presented.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Noel Ivan Toto-Arellano, David I. Serrano-Garcia, Gustavo Rodriguez-Zurita, "Optical path difference measurements with a two-step parallel phase shifting interferometer based on a modified Michelson configuration," Optical Engineering 56(9), 094107 (12 September 2017). https://doi.org/10.1117/1.OE.56.9.094107 . Submission: Received: 4 May 2017; Accepted: 14 August 2017
Received: 4 May 2017; Accepted: 14 August 2017; Published: 12 September 2017
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