15 September 2017 Hybrid subtractive-additive-welding microfabrication for lab-on-chip applications via single amplified femtosecond laser source
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Abstract
An approach employing ultrafast laser hybrid subtractive-additive microfabrication, which combines ablation, three-dimensional nanolithography, and welding, is proposed for the realization of a lab-on-chip (LOC) device. A single amplified Yb:KGW femtosecond (fs)-pulsed laser source is shown to be suitable for fabricating microgrooves in glass slabs, polymerization of fine-meshes microfilter out of hybrid organic–inorganic photopolymer SZ2080 inside them, and, finally, sealing the whole chip with cover glass into a single monolithic piece. The created microfluidic device proved its particle sorting function by separating 1- and 10-μm polystyrene spheres in an aqueous mixture. All together, this proves that laser microfabrication based on a single amplified fs laser source is a flexible and versatile approach for the hybrid subtractive-additive manufacturing of functional mesoscale multimaterial LOC devices.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Linas Jonušauskas, Sima Rekštyte, Ričardas Buividas, Simas Butkus, Roaldas Gadonas, Saulius Juodkazis, Mangirdas Malinauskas, "Hybrid subtractive-additive-welding microfabrication for lab-on-chip applications via single amplified femtosecond laser source," Optical Engineering 56(9), 094108 (15 September 2017). https://doi.org/10.1117/1.OE.56.9.094108 . Submission: Received: 7 April 2017; Accepted: 18 August 2017
Received: 7 April 2017; Accepted: 18 August 2017; Published: 15 September 2017
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