15 September 2017 Hybrid subtractive-additive-welding microfabrication for lab-on-chip applications via single amplified femtosecond laser source
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Abstract
An approach employing ultrafast laser hybrid subtractive-additive microfabrication, which combines ablation, three-dimensional nanolithography, and welding, is proposed for the realization of a lab-on-chip (LOC) device. A single amplified Yb:KGW femtosecond (fs)-pulsed laser source is shown to be suitable for fabricating microgrooves in glass slabs, polymerization of fine-meshes microfilter out of hybrid organic–inorganic photopolymer SZ2080 inside them, and, finally, sealing the whole chip with cover glass into a single monolithic piece. The created microfluidic device proved its particle sorting function by separating 1- and 10-μm polystyrene spheres in an aqueous mixture. All together, this proves that laser microfabrication based on a single amplified fs laser source is a flexible and versatile approach for the hybrid subtractive-additive manufacturing of functional mesoscale multimaterial LOC devices.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Linas Jonušauskas, Linas Jonušauskas, Sima Rekštyte, Sima Rekštyte, Ričardas Buividas, Ričardas Buividas, Simas Butkus, Simas Butkus, Roaldas Gadonas, Roaldas Gadonas, Saulius Juodkazis, Saulius Juodkazis, Mangirdas Malinauskas, Mangirdas Malinauskas, } "Hybrid subtractive-additive-welding microfabrication for lab-on-chip applications via single amplified femtosecond laser source," Optical Engineering 56(9), 094108 (15 September 2017). https://doi.org/10.1117/1.OE.56.9.094108 . Submission: Received: 7 April 2017; Accepted: 18 August 2017
Received: 7 April 2017; Accepted: 18 August 2017; Published: 15 September 2017
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