Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application

Hilmi Artun Oyman; Yigit Daghan Gökdel; Onur Ferhanoglu; Arda Deniz Yalcinkaya

doi:10.1117/1.OE.57.4.041405

5 February 2018 Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application

Hilmi Artun Oyman, Yigit Daghan Gökdel, Onur Ferhanoglu, Arda Deniz Yalcinkaya

Author Affiliations +

Optical Engineering, Vol. 57, Issue 4, 041405 (February 2018). https://doi.org/10.1117/1.OE.57.4.041405

Abstract

A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3×106 cycle. The scanning device is designed to meet a confocal microscopy application providing 100 μm×100 μm field of view and <3-μm lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution.

Citation Download Citation

Hilmi Artun Oyman, Yigit Daghan Gökdel, Onur Ferhanoglu, and Arda Deniz Yalcinkaya "Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application," Optical Engineering 57(4), 041405 (5 February 2018). https://doi.org/10.1117/1.OE.57.4.041405

Received: 1 August 2017; Accepted: 3 January 2018; Published: 5 February 2018

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