3 January 2018 Optimization of pencil beam f-theta lens for high-accuracy metrology
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Pencil beam deflectometric profilers are common instruments for high-accuracy surface slope metrology of x-ray mirrors in synchrotron facilities. An f-theta optical system is a key optical component of the deflectometric profilers and is used to perform the linear angle-to-position conversion. Traditional optimization procedures of the f-theta systems are not directly related to the angle-to-position conversion relation and are performed with stops of large size and a fixed working distance, which means they may not be suitable for the design of f-theta systems working with a small-sized pencil beam within a working distance range for ultra-high-accuracy metrology. If an f-theta system is not well-designed, aberrations of the f-theta system will introduce many systematic errors into the measurement. A least-squares’ fitting procedure was used to optimize the configuration parameters of an f-theta system. Simulations using ZEMAX software showed that the optimized f-theta system significantly suppressed the angle-to-position conversion errors caused by aberrations. Any pencil-beam f-theta optical system can be optimized with the help of this optimization method.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
Chuanqian Peng, Chuanqian Peng, Yumei He, Yumei He, Jie Wang, Jie Wang, } "Optimization of pencil beam f-theta lens for high-accuracy metrology," Optical Engineering 57(1), 015101 (3 January 2018). https://doi.org/10.1117/1.OE.57.1.015101 . Submission: Received: 26 September 2017; Accepted: 11 December 2017
Received: 26 September 2017; Accepted: 11 December 2017; Published: 3 January 2018

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