Method to evaluate surface figure error budget for optical systems

Weichuan Gao; Richard N. Youngworth; Jose Sasian

doi:10.1117/1.OE.57.10.105108

29 October 2018 Method to evaluate surface figure error budget for optical systems

Weichuan Gao, Richard N. Youngworth, Jose Sasian

Author Affiliations +

Optical Engineering, Vol. 57, Issue 10, 105108 (October 2018). https://doi.org/10.1117/1.OE.57.10.105108

Abstract

We present a simple method to assess surface figure error tolerances of optical systems. From a statistical analysis, an empirical equation is obtained for estimating the overall wavefront error contribution from surface figure error tolerance assigned on each surface. The same equation can be used to evaluate the inverse sensitivity for surface figure error specification given an error budget.

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Weichuan Gao, Richard N. Youngworth, and Jose Sasian "Method to evaluate surface figure error budget for optical systems," Optical Engineering 57(10), 105108 (29 October 2018). https://doi.org/10.1117/1.OE.57.10.105108

Received: 9 June 2018; Accepted: 12 October 2018; Published: 29 October 2018

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