Real-time measurement of microcantilever displacement based on Linnik microscopic speckle interferometer

Chenjia Gao; Zhan Gao; Xu Wang; Zihui Liu; Chuqian Zhong; Yuan Zhang; Yuchen Liu

doi:10.1117/1.OE.57.12.124101

10 December 2018 Real-time measurement of microcantilever displacement based on Linnik microscopic speckle interferometer

Chenjia Gao, Zhan Gao, Xu Wang, Zihui Liu, Chuqian Zhong, Yuan Zhang, Yuchen Liu

Author Affiliations +

Optical Engineering, Vol. 57, Issue 12, 124101 (December 2018). https://doi.org/10.1117/1.OE.57.12.124101

Abstract

Nowadays, the application of MEMS is more and more important. With the development of microstructure technology, higher requirements are also placed on measurement methods. However, the current measurement methods cannot meet these requirements due to their own limitations. We developed a method based on the temporal microscopic speckle interferometry, which has advantages of real-time, full field, high-precision, and nondestructive. The interferometer based on Linnik microscopic structure is built up. The corresponding displacement measuring experiments have been performed, and the measurement errors are <0.05 μm. The experimental results demonstrate the validity of our homemade device.

Citation Download Citation

Chenjia Gao, Zhan Gao, Xu Wang, Zihui Liu, Chuqian Zhong, Yuan Zhang, and Yuchen Liu "Real-time measurement of microcantilever displacement based on Linnik microscopic speckle interferometer," Optical Engineering 57(12), 124101 (10 December 2018). https://doi.org/10.1117/1.OE.57.12.124101

Received: 29 September 2018; Accepted: 19 November 2018; Published: 10 December 2018

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