9 March 2018 Optical design and system characterization of an imaging microscope at 121.6 nm
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Abstract
We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
Weichuan Gao, Weichuan Gao, Emily Finan, Emily Finan, Geon-Hee Kim, Geon-Hee Kim, Youngsik Kim, Youngsik Kim, Thomas D. Milster, Thomas D. Milster, } "Optical design and system characterization of an imaging microscope at 121.6 nm," Optical Engineering 57(3), 035101 (9 March 2018). https://doi.org/10.1117/1.OE.57.3.035101 . Submission: Received: 12 December 2017; Accepted: 15 February 2018
Received: 12 December 2017; Accepted: 15 February 2018; Published: 9 March 2018
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