Optical lithography of three-dimensional magnetophotonic microdevices

Dam Thuy Trang Nguyen; Olivia Del Guercio; Thi Huong Au; Duc Thien Trinh; Nguyen Phuong Thao Mai; Ngoc Diep Lai

doi:10.1117/1.OE.57.4.041406

1 March 2018 Optical lithography of three-dimensional magnetophotonic microdevices

Dam Thuy Trang Nguyen, Olivia Del Guercio, Thi Huong Au, Duc Thien Trinh, Nguyen Phuong Thao Mai, Ngoc Diep Lai

Author Affiliations +

Optical Engineering, 57(4), 041406 (2018). https://doi.org/10.1117/1.OE.57.4.041406

Abstract

We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed.

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Dam Thuy Trang Nguyen, Dam Thuy Trang Nguyen, Olivia Del Guercio, Olivia Del Guercio, Thi Huong Au, Thi Huong Au, Duc Thien Trinh, Duc Thien Trinh, Nguyen Phuong Thao Mai, Nguyen Phuong Thao Mai, Ngoc Diep Lai, Ngoc Diep Lai, "Optical lithography of three-dimensional magnetophotonic microdevices," Optical Engineering 57(4), 041406 (1 March 2018). https://doi.org/10.1117/1.OE.57.4.041406 . Submission: Received: 22 September 2017; Accepted: 9 February 2018

Received: 22 September 2017; Accepted: 9 February 2018; Published: 1 March 2018

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