Optical lithography of three-dimensional magnetophotonic microdevices

Dam Thuy Trang Nguyen; Olivia Del Guercio; Thi Huong Au; Duc Thien Trinh; Nguyen Phuong Thao Mai; Ngoc Diep Lai

doi:10.1117/1.OE.57.4.041406

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1 March 2018 Optical lithography of three-dimensional magnetophotonic microdevices

Dam Thuy Trang Nguyen; Olivia Del Guercio; Thi Huong Au; Duc Thien Trinh; Nguyen Phuong Thao Mai; Ngoc Diep Lai

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Optical Engineering, 57(4), 041406 (2018). https://doi.org/10.1117/1.OE.57.4.041406

Abstract

We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed.

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Dam Thuy Trang Nguyen, Olivia Del Guercio, Thi Huong Au, Duc Thien Trinh, Nguyen Phuong Thao Mai, and Ngoc Diep Lai "Optical lithography of three-dimensional magnetophotonic microdevices," Optical Engineering 57(4), 041406 (1 March 2018). https://doi.org/10.1117/1.OE.57.4.041406

Received: 22 September 2017; Accepted: 9 February 2018; Published: 1 March 2018

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