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1 March 2018 Optical lithography of three-dimensional magnetophotonic microdevices
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We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2018/$25.00 © 2018 SPIE
Dam Thuy Trang Nguyen, Olivia Del Guercio, Thi Huong Au, Duc Thien Trinh, Nguyen Phuong Thao Mai, and Ngoc Diep Lai "Optical lithography of three-dimensional magnetophotonic microdevices," Optical Engineering 57(4), 041406 (1 March 2018).
Received: 22 September 2017; Accepted: 9 February 2018; Published: 1 March 2018

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