8 February 2018 Measurement of microsurface topography using a self-mixing optical configuration
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Abstract
This work proposes to measure the topography of microstructure surfaces using a self-mixing interference (SMI) configuration. The theoretical measurement model is built using beam-expanded plane wave method and considering SMI effect. The interference patterns for different objects are obtained based on the presented model. In addition, an algorithm for reconstructing the three-dimensional surface is implemented and applied onto an object with spherical surface. The presented work shows the potential application for topography measurement using a compact SMI configuration.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
Xiaohong Sun, Han Wang, Bin Liu, Yanguang Yu, "Measurement of microsurface topography using a self-mixing optical configuration," Optical Engineering 57(5), 051503 (8 February 2018). https://doi.org/10.1117/1.OE.57.5.051503 . Submission: Received: 6 November 2017; Accepted: 14 December 2017
Received: 6 November 2017; Accepted: 14 December 2017; Published: 8 February 2018
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