26 February 2018 Development of high-resolution active matrix spatial light modulator
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Abstract
We developed a high-resolution active matrix spatial light modulator on a glass substrate. To integrate a switching device on the glass substrate, we designed a high-performance oxide thin-film transistor with a minimum channel length of 1  μm and a maximum processing temperature of 380°C. To drive a large number of data lines, we used multiple source drivers and data drivers as well. For an optical modulation, we optimized a liquid crystal of a high anisotropic refractive index of 0.25 with a cell gap of 2.5  μm, which was effectively operated until pixel pitch is 1.6  μm. Hologram was successfully reconstructed by fabricated SLM with 7-μm pixel pitch. For the other approach for a high-resolution spatial light modulator, we tested a phase change material of Ge2Sb2Te5 [GST]. The variation of refractive index between a polycrystalline phase and an amorphous phase of the GST film is used for a hologram reconstruction. By optimizing the underlying oxide thickness, we can show a color hologram without color filters.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
Yong-Hae Kim, Yong-Hae Kim, Chi-Young Hwang, Chi-Young Hwang, Ji Hun Choi, Ji Hun Choi, Jae-Eun Pi, Jae-Eun Pi, Jong-Heon Yang, Jong-Heon Yang, Seong-Mok Cho, Seong-Mok Cho, Sang-Hoon Cheon, Sang-Hoon Cheon, Gi Heon Kim, Gi Heon Kim, Kyunghee Choi, Kyunghee Choi, Hee-Ok Kim, Hee-Ok Kim, Won-Jae Lee, Won-Jae Lee, Han-Byeol Kang, Han-Byeol Kang, Chi-Sun Hwang, Chi-Sun Hwang, } "Development of high-resolution active matrix spatial light modulator," Optical Engineering 57(6), 061606 (26 February 2018). https://doi.org/10.1117/1.OE.57.6.061606 . Submission: Received: 31 October 2017; Accepted: 31 January 2018
Received: 31 October 2017; Accepted: 31 January 2018; Published: 26 February 2018
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