Quantitative aberration measurement with extended ptychographic iterative engine

Bangming Zong; Jiayun Luan; Zhilong Jiang; Yan Kong; Shouyu Wang; Cheng Liu

doi:10.1117/1.OE.58.5.054102

23 May 2019 Quantitative aberration measurement with extended ptychographic iterative engine

Bangming Zong, Jiayun Luan, Zhilong Jiang, Yan Kong, Shouyu Wang, Cheng Liu

Author Affiliations +

Optical Engineering, Vol. 58, Issue 5, 054102 (May 2019). https://doi.org/10.1117/1.OE.58.5.054102

Abstract

A computational method is proposed to measure the aberration of a lens using an extended ptychographic iterative engine. By reconstructing the entering wavefront φ_in and exiting wavefront φ_ex of the lens under detection from two sets of diffraction patterns iteratively, the lens aberration can be easily extracted by subtracting the phase of φ_in and theoretical lens phase from the phase of φ_ex. Since it needs no extra reference beam and high quality optics, this suggested method has advantages of simplicity in structure, high accuracy, and low requirement on working environment, and it is free of the aberration of other optical elements in the experimental system, indicating it can find lots of applications in lens evaluation.

Citation Download Citation

Bangming Zong, Jiayun Luan, Zhilong Jiang, Yan Kong, Shouyu Wang, and Cheng Liu "Quantitative aberration measurement with extended ptychographic iterative engine," Optical Engineering 58(5), 054102 (23 May 2019). https://doi.org/10.1117/1.OE.58.5.054102

Received: 2 January 2019; Accepted: 15 April 2019; Published: 23 May 2019

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