Evolution and removal of surface scratches on fused silica under magnetorheological finishing

Jianwei Ji; Wei Gao; Chao Wang; Yunfei Zhang; Wei Fan; Min Xu; Fang Ji

doi:10.1117/1.OE.58.5.055102

31 May 2019 Evolution and removal of surface scratches on fused silica under magnetorheological finishing

Jianwei Ji, Wei Gao, Chao Wang, Yunfei Zhang, Wei Fan, Min Xu, Fang Ji

Author Affiliations +

Optical Engineering, Vol. 58, Issue 5, 055102 (May 2019). https://doi.org/10.1117/1.OE.58.5.055102

Abstract

Magnetorheological finishing (MRF) is usually used to remove subsurface defects (SSD) of workpieces to improve the laser-induced damage threshold due to its low stress. Although MRF has been widely used to remove surface defects and SSD, the evolution and removal mechanism of surface scratches under MRF have not been fully elucidated. A systematic study is conducted on the scratch removal process and removal ability of MRF. First, an experimental study on the removal of scratches with different depths is carried out, and the effect of the scratch depth on the removal efficiency is analyzed. Second, when the scratches are removed, the processing is performed in two directions: parallel and perpendicular to the scratch. Thereby, the relationship between the scratch removal efficiency (SRE) and the processing direction is analyzed. Finally, based on the scratch removal process and mechanism, an innovative method for efficient scratch removal using a sacrificial layer is proposed. The effectiveness of this method is verified by experiments. This method can significantly improve the SRE of MRF.

Citation Download Citation

Jianwei Ji, Wei Gao, Chao Wang, Yunfei Zhang, Wei Fan, Min Xu, and Fang Ji "Evolution and removal of surface scratches on fused silica under magnetorheological finishing," Optical Engineering 58(5), 055102 (31 May 2019). https://doi.org/10.1117/1.OE.58.5.055102

Received: 18 January 2019; Accepted: 26 April 2019; Published: 31 May 2019

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available