Translator Disclaimer
8 November 2019 Line fitting tolerance estimation for Wolter-I microscope
Author Affiliations +
Abstract

Characterized by a high resolution, high throughput (large effective area), and large field of view, the Wolter-I microscope is the main grazing incidence imaging device for x-rays and neutrons. It is necessary to estimate the tolerance of surface deformation to achieve the required resolution in typical applications. Traditional tolerance estimation method based on Monte Carlo method required a large random sampling in a given sampling area and has a low efficiency. We derived the transverse ray aberration equations to investigate the image quality degradation caused by principal figure and alignment errors and proposed a line fitting tolerance estimation method. Finally, the figure and alignment error tolerances of a Wolter-I microscope are discussed.

© 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2019/$28.00 © 2019 SPIE
Zhengxiang Shen, Pengfeng Sheng, Yingyu Liao, and Zhanshan Wang "Line fitting tolerance estimation for Wolter-I microscope," Optical Engineering 58(11), 115101 (8 November 2019). https://doi.org/10.1117/1.OE.58.11.115101
Received: 16 July 2019; Accepted: 17 October 2019; Published: 8 November 2019
JOURNAL ARTICLE
11 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Imaging performance analysis in support of the AXAF I high...
Proceedings of SPIE (September 12 1994)
Tolerancing The Lite Optical System
Proceedings of SPIE (January 26 1989)
Critical-angle refractometry: accuracy analysis
Proceedings of SPIE (November 30 1991)

Back to Top