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11 April 2019 Microlaser assisted diamond turning of precision silicon optics
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Abstract
The application of microlaser assisted machining of precision optical components made of optical grade single-crystal Si is reviewed. An optical raytracing model is developed and used for predicting the laser interaction with the workpiece. Optical characterization of the system is shown to be in good agreement with that predicted by the model. Using the information from the simulation and experimental validation, the laser-assisted diamond turning of single-crystal Si samples is shown to have exhibited little to no brittle fracture on the surface and the potential of extending the diamond tooling life by 150%.
© 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2019/$25.00 © 2019 SPIE
Hossein Shahinian, Jayesh Navare, Dmytro Zaytsev, and Deepak Ravindra "Microlaser assisted diamond turning of precision silicon optics," Optical Engineering 58(9), 092607 (11 April 2019). https://doi.org/10.1117/1.OE.58.9.092607
Received: 29 January 2019; Accepted: 27 March 2019; Published: 11 April 2019
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