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27 September 2019 Design of ultra-precise scanning deflectometer
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Abstract

A proposal of the design for a deflectometric profilometer that combines several advantages in one device to achieve an ultra-precise straightness measurement as a scanning deflectometer is described. The device allows measurement of the absolute flatness of large optical surfaces at the nanometer level. The proposed setup also allows the ability to measure optical flats with both sides polished. The along-scan resolution of the measured profiles could be below a millimeter.

© 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2019/$28.00 © 2019 SPIE
Petr Kren "Design of ultra-precise scanning deflectometer," Optical Engineering 58(9), 094110 (27 September 2019). https://doi.org/10.1117/1.OE.58.9.094110
Received: 1 July 2019; Accepted: 11 September 2019; Published: 27 September 2019
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