A proposal of the design for a deflectometric profilometer that combines several advantages in one device to achieve an ultra-precise straightness measurement as a scanning deflectometer is described. The device allows measurement of the absolute flatness of large optical surfaces at the nanometer level. The proposed setup also allows the ability to measure optical flats with both sides polished. The along-scan resolution of the measured profiles could be below a millimeter.
You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.