Translator Disclaimer
8 January 2020 Two-dimensional Fourier domain Ronchi ruling measurement using Talbot-based crossing point modeling
Author Affiliations +
Abstract

We propose a direct two-dimensional Fourier domain fitting-free method to determine the period of a Ronchi ruling. A precise method to measure a spatial frequency target’s quality and fidelity is highly desired as the pattern period directly affects every aspect of a spatial frequency target-based metrology, including the accuracy and precision of the measurement or evaluations. A standard Talbot experimental apparatus and the Talbot effect are used to obtain and model our data. To determine the period of the ruling directly, only a common digital camera, with a protective glass and an air gap in front of the sensor array, and a Ronchi ruling of chrome deposited on a glass substrate are required. The Talbot effect-based crossing point modeling technique requires no calibration or a priori information but simply the pixel size of the digital camera and a precise means of measuring the spatial frequency from a Talbot image. For a Ronchi ruling with a period specification of 0.1 mm, the nanometric measurement was found to be 0.100010 mm with an error level of 5 nm.

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2020/$28.00 © 2020 SPIE
Sukmock Lee and Dae Wook Kim "Two-dimensional Fourier domain Ronchi ruling measurement using Talbot-based crossing point modeling," Optical Engineering 59(1), 014106 (8 January 2020). https://doi.org/10.1117/1.OE.59.1.014106
Received: 19 September 2019; Accepted: 18 December 2019; Published: 8 January 2020
JOURNAL ARTICLE
8 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Performance assessment of microgrid polarization cameras
Proceedings of SPIE (September 06 2019)
Optimal conception of an IR camera
Proceedings of SPIE (November 01 1990)

Back to Top