Open Access
1 August 2011 Microfluidic sensing: state of the art fabrication and detection techniques
Jing Wu, Min Gu
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Abstract
Here we introduce the existing fabrication techniques, detection methods, and related techniques for microfluidic sensing, with an emphasis on the detection techniques. A general survey and comparison of the fabrication techniques were given, including prototyping (hot embossing, inject molding, and soft lithography) and direct fabrication (laser micromachining, photolithography, lithography, and x-ray lithography) techniques. This is followed by an in-depth look at detection techniques: optical, electrochemical, mass spectrometry, as well as nuclear magnetic resonance spectroscopy-based sensing approaches and related techniques. In the end, we highlight several of the most important issues for future work on microfluidic sensing. This article aims at providing a tutorial review with both introductory materials and inspiring information on microfluidic fabrication and sensing for nonspecialists.
©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Jing Wu and Min Gu "Microfluidic sensing: state of the art fabrication and detection techniques," Journal of Biomedical Optics 16(8), 080901 (1 August 2011). https://doi.org/10.1117/1.3607430
Published: 1 August 2011
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CITATIONS
Cited by 173 scholarly publications and 7 patents.
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KEYWORDS
Microfluidics

Fabrication

Sensors

Lithography

Sensing systems

Proteins

Optical lithography

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