journal of micro nanolithography mems and moems
VOL. 17 · NO. 3 | July 2018
CONTENTS
Microelectromechanical systems (MEMS)
Jia Jia, Xukai Ding, Yang Gao, Hongsheng Li
J. Micro/Nanolith. MEMS MOEMS 17(3), 035001 (10 July 2018) https://doi.org/10.1117/1.JMM.17.3.035001
TOPICS: Gyroscopes, Demodulation, Microelectromechanical systems, Signal detection, Neural networks, Temperature metrology, Evolutionary algorithms, Control systems, Data modeling, Lithium
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