journal of micro nanolithography mems and moems
VOL. 17 · NO. 1 | January 2018
CONTENTS
Lithography
Stephen J. Bauman, Ahmad A. Darweesh, Desalegn T. Debu, Joseph B. Herzog
J. Micro/Nanolith. MEMS MOEMS 17(1), 013501 (2 January 2018) doi:10.1117/1.JMM.17.1.013501
TOPICS: Lithography, Nanolithography, Nanostructures, Gold, Fabrication, Chromium, Scanning electron microscopy, Optical lithography, Plasmonics, Edge roughness
Jingyu Wang, William Wilkinson
J. Micro/Nanolith. MEMS MOEMS 17(1), 013502 (2 January 2018) doi:10.1117/1.JMM.17.1.013502
TOPICS: Optical proximity correction, Back end of line, Semiconducting wafers, Optical lithography, Photomasks, Diffraction, Lithography, Lithographic illumination, Optical instrument design, Instrumentation engineering
Microfabrication
Zishan Ali Syed Mohammed, Poenar Daniel Puiu, Sheel Aditya
J. Micro/Nanolith. MEMS MOEMS 17(1), 014501 (9 January 2018) doi:10.1117/1.JMM.17.1.014501
TOPICS: Copper, Silicon, Resistance, Electroplating, Etching, Diffractive optical elements, Wet etching, Semiconducting wafers, Signal to noise ratio, Plating
Microelectromechanical systems (MEMS)
Zhiwei Kou, Jun Liu, Huiliang Cao, Ziqi Han, Yanan Sun, Yunbo Shi, Senxin Ren, Yingjie Zhang
J. Micro/Nanolith. MEMS MOEMS 17(1), 015001 (16 January 2018) doi:10.1117/1.JMM.17.1.015001
TOPICS: Gyroscopes, Resonators, Electrodes, Microelectromechanical systems, Silicon, Finite element methods, Glasses, Manufacturing, Prototyping, Semiconducting wafers
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