journal of micro nanolithography mems and moems
VOL. 17 · NO. 1 | January 2018
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 17(1), 010102 (19 January 2018) doi:10.1117/1.JMM.17.1.010102
TOPICS: Lithium, Microelectromechanical systems, Microopto electromechanical systems, Sun, Fluctuations and noise
Lithography
Stephen J. Bauman, Ahmad A. Darweesh, Desalegn T. Debu, Joseph B. Herzog
J. Micro/Nanolith. MEMS MOEMS 17(1), 013501 (2 January 2018) doi:10.1117/1.JMM.17.1.013501
TOPICS: Lithography, Nanolithography, Nanostructures, Gold, Fabrication, Chromium, Scanning electron microscopy, Optical lithography, Plasmonics, Edge roughness
Jingyu Wang, William Wilkinson
J. Micro/Nanolith. MEMS MOEMS 17(1), 013502 (2 January 2018) doi:10.1117/1.JMM.17.1.013502
TOPICS: Optical proximity correction, Back end of line, Semiconducting wafers, Optical lithography, Photomasks, Diffraction, Lithography, Lithographic illumination, Optical instrument design, Instrumentation engineering
Luca Mattii, Dragomir Milojevic, Peter Debacker, Mladen Berekovic, Syed Muhammad Yasser Sherazi, Bharani Chava, Marie Garcia Bardon, Pieter Schuddinck, Dimitrios Rodopoulos, Rogier Baert, Vassilios Gerousis, Julien Ryckaert, Praveen Raghavan
J. Micro/Nanolith. MEMS MOEMS 17(1), 013503 (18 January 2018) doi:10.1117/1.JMM.17.1.013503
TOPICS: Metals, Standards development, Electronic design automation, Optical lithography, Back end of line, Switching, CMOS technology, Lithography, Front end of line, Integrated circuit design
Microfabrication
Zishan Ali Syed Mohammed, Poenar Daniel Puiu, Sheel Aditya
J. Micro/Nanolith. MEMS MOEMS 17(1), 014501 (9 January 2018) doi:10.1117/1.JMM.17.1.014501
TOPICS: Copper, Silicon, Resistance, Electroplating, Etching, Diffractive optical elements, Wet etching, Semiconducting wafers, Signal to noise ratio, Plating
Microelectromechanical systems (MEMS)
Zhiwei Kou, Jun Liu, Huiliang Cao, Ziqi Han, Yanan Sun, Yunbo Shi, Senxin Ren, Yingjie Zhang
J. Micro/Nanolith. MEMS MOEMS 17(1), 015001 (16 January 2018) doi:10.1117/1.JMM.17.1.015001
TOPICS: Gyroscopes, Resonators, Electrodes, Microelectromechanical systems, Silicon, Finite element methods, Glasses, Manufacturing, Prototyping, Semiconducting wafers
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