Journal of Micro/Nanolithography, MEMS, and MOEMS

Editor-in-Chief: Chris A. Mack, Lithoguru.com, USA

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, MEMS, MOEMS, and photonics industries. The wide range of such devices includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries. The wide range of such devices also includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal. Topical areas covered include:

Lithography
Microelectromechanical systems (MEMS)
Micro-optoelectromechanical systems (MOEMS)
Microfabrication
Metrology
Journal Details

    About the Journal

    ISSN: 1932-5150
    E-ISSN: 1932-5134
    Publisher: SPIE
    Frequency: Quarterly (4 issue/year)
    Year established: 2002
    Format: Online and Print
    Impact Factor*: 1.350
    5-Year Impact Factor*: 1.273
    CiteScoreTM 2016:  1.21
    h5-index: 18

    *2016 Journal Citation Reports®


    Abstracting and Indexing

    • Science Citation Index Expanded
    • Materials Science Citation Index
    • Current Contents - Physical, Chemical & Earth Sciences
    • Current Contents - Engineering, Computing & Technology
    • Inspec
    • Scopus
    • Ei Compendex
    • Astrophysics Data System

    Editorial Office

    Contact the JM3 staff at:

    SPIE
    P.O. Box 10
    Bellingham, WA 98227-0010 USA
    tel: +1 360 676 3290
    fax: +1 360 647 1445
    journals@spie.org

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