journal of micro nanolithography mems and moems
VOL. 1 · NO. 1 | April 2002
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1458964
IMAGING THEORY
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1445798
TOPICS: Image resolution, Immersion lithography, Refractive index, Wavefronts, Optical lithography, Paraxial approximations, Galactic astronomy, Liquids, Spherical lenses, Lithography
MASK DESIGN
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1448500
TOPICS: Photomasks, Optimization (mathematics), Reticles, Diffraction, Wavefronts, Algorithm development, Phase shifts, Tolerancing, Resolution enhancement technologies, Detection and tracking algorithms
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1435368
TOPICS: Photomasks, Computer aided design, Phase shifts, Lithography, Logic, Manufacturing, Logic devices, Resolution enhancement technologies, Chemical elements, Tolerancing
BIREFRINGENCE
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1445429
TOPICS: Photomasks, Birefringence, Silica, Optical components, Polarization, Semiconducting wafers, Lithography, Combined lens-mirror systems, Sensors, Image quality
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1434978
TOPICS: Birefringence, Wavefronts, Polarization, Modulation transfer functions, Image acquisition, Projection systems, Optical lithography, Fluorine, Optical components, Coherence imaging
ANTIREFLECTION COATINGS
Hsuen-Li Chen, W. Chao, Fu-Hsiang Ko, Tien-Chi Chu, Tiao-Yuan Huang
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1447947
TOPICS: Reflectivity, Silicon, Deep ultraviolet, Aluminum, Lithography, Tolerancing, Bottom antireflective coatings, Absorption, Etching, Copper
THIN FILM RESONATORS
Robert Kazinczi, Jeff Mollinger, Andre Bossche
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1434979
TOPICS: Silicon carbide, Silicon, Resonators, Atomic force microscopy, Packaging, Oxides, Particles, Atmospheric particles, Adsorption, Oxidation
MICROMIRRORS
Julianna Lin, Vikas Sharma, Feras Michael, Andrew Kirk
J. Micro/Nanolith. MEMS MOEMS 1(1), (1 April 2002) doi:10.1117/1.1445799
TOPICS: Mirrors, Electrodes, Micromirrors, Microelectromechanical systems, Analog electronics, Motion models, Phase shifts, Instrument modeling, Control systems, Data modeling
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