journal of micro nanolithography mems and moems
VOL. 1 · NO. 2 | July 2002
CONTENTS
Editorial
CLASSIC PAPERS
Frits Zernike
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1488608
TOPICS: Mirrors, Diffraction, Spherical lenses, Mirror pointing, Light sources, Geometrical optics, Radon, Optical imaging, Eye, Image processing
OPTICAL IMAGING
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1450596
TOPICS: Diffraction, Optical proximity correction, Resolution enhancement technologies, Binary data, Phase shifts, Modulation, Photomasks, Image enhancement, Opacity, Spatial frequencies
Alfred Wong, Antoinette Molless, Timothy Brunner, Eric Coker, Robert Fair, George Mack, Scott Mansfield
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1488159
TOPICS: Photomasks, Semiconducting wafers, Critical dimension metrology, Optical proximity correction, Spatial analysis, Optical lithography, Error analysis, Process control, Lithography, Resolution enhancement technologies
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1484160
TOPICS: Laser ablation, Electrodes, Modulators, Excimer lasers, Optical modulators, Pulsed laser operation, Waveguides, Crystals, Lithium, Lithium niobate
ELECTRON BEAM LITHOGRAPHY
Ampere Tseng, Chii Chen, C. Wu, Rodolfo Diaz, Michael Watts
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1479707
TOPICS: Electron beam lithography, Near field optics, Glasses, Coating, Computer aided design, Germanium, Near field, Photoresist processing, Polymethylmethacrylate, Diffraction
Takehisa Yahiro, Noriyuki Hirayanagi, Takeshi Irita, Hiroyasu Shimizu, Kazuaki Suzuki
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1451082
TOPICS: Signal detection, Image sensors, Calibration, Silicon, Sensors, Electron beams, Electron beam lithography, Signal to noise ratio, Optical testing, Projection lithography
MAGNETIC MICROACTUATORS
Chun-Hsu Ko, J. Yang, J.C. Chiou
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1484161
TOPICS: Magnetism, Microactuators, Actuators, Copper, Finite element methods, Electroplating, Etching, Silicon, Electromagnetism, Semiconducting wafers
ORGANIC MICROMACHINING
Wai Liu, David Steenson, Michael Steer
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1463042
TOPICS: Micromachining, Waveguides, Copper, Silicon, Glasses, Silver, Metals, Resonators, Dielectrics, Thermal oxidation
SILICON MEMS
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1484162
TOPICS: Etching, Anisotropic etching, Oxides, Silicon, Fabrication, Semiconducting wafers, CMOS technology, Low pressure chemical vapor deposition, Micromachining, Bulk micromachining
Paul Rainey, S. J. Mitchell, Harold Gamble
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1479708
TOPICS: Silicon, Capillaries, Capacitance, Oxides, Etching, Semiconducting wafers, Dielectrics, Molybdenum, Glasses, Liquids
Andrzej Prochaska, S. J. Mitchell, Tatiana Perova, Remy Maurice, Paul Baine, Harold Gamble
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1450597
TOPICS: Silicon, Semiconducting wafers, Raman spectroscopy, Wafer bonding, Oxides, Etching, Protactinium, X-rays, Phonons, Finite element methods
Back to Top