Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 1 · NO. 2 | July 2002
CONTENTS
Editorial
CLASSIC PAPERS
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1488608
TOPICS: Mirrors, Diffraction, Spherical lenses, Mirror pointing, Light sources, Geometrical optics, Radon, Optical imaging, Eye, Image processing
OPTICAL IMAGING
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1450596
TOPICS: Diffraction, Optical proximity correction, Resolution enhancement technologies, Binary data, Phase shifts, Modulation, Photomasks, Image enhancement, Opacity, Spatial frequencies
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1488159
TOPICS: Photomasks, Semiconducting wafers, Critical dimension metrology, Optical proximity correction, Spatial analysis, Optical lithography, Error analysis, Process control, Lithography, Resolution enhancement technologies
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1484160
TOPICS: Laser ablation, Electrodes, Modulators, Excimer lasers, Optical modulators, Pulsed laser operation, Waveguides, Crystals, Lithium, Lithium niobate
ELECTRON BEAM LITHOGRAPHY
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1479707
TOPICS: Electron beam lithography, Near field optics, Glasses, Coating, Computer aided design, Germanium, Near field, Photoresist processing, Polymethylmethacrylate, Diffraction
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1451082
TOPICS: Signal detection, Image sensors, Calibration, Silicon, Sensors, Electron beams, Electron beam lithography, Signal to noise ratio, Optical testing, Projection lithography
MAGNETIC MICROACTUATORS
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1484161
TOPICS: Magnetism, Microactuators, Actuators, Copper, Finite element methods, Electroplating, Etching, Silicon, Electromagnetism, Semiconducting wafers
ORGANIC MICROMACHINING
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1463042
TOPICS: Micromachining, Waveguides, Copper, Silicon, Glasses, Silver, Metals, Resonators, Dielectrics, Thermal oxidation
SILICON MEMS
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1484162
TOPICS: Etching, Anisotropic etching, Oxides, Silicon, Fabrication, Semiconducting wafers, CMOS technology, Low pressure chemical vapor deposition, Micromachining, Bulk micromachining
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1479708
TOPICS: Silicon, Capillaries, Capacitance, Oxides, Etching, Semiconducting wafers, Dielectrics, Molybdenum, Glasses, Liquids
J. Micro/Nanolith. MEMS MOEMS 1(2), (1 July 2002) https://doi.org/10.1117/1.1450597
TOPICS: Silicon, Semiconducting wafers, Raman spectroscopy, Wafer bonding, Oxides, Etching, Protactinium, X-rays, Phonons, Finite element methods
Back to Top