Wavefront-based pixel inversion algorithm for generation of subresolution assist features

Jue-Chin Yu; Peichen Yu; Hsueh-Yung Chao

doi:10.1117/1.3663249

1 October 2011 Wavefront-based pixel inversion algorithm for generation of subresolution assist features

Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 4, 043014 (October 2011). https://doi.org/10.1117/1.3663249

Abstract

The generation of subresolution assist features (SRAFs) using inverse-lithography techniques demands extensive computational resources which limits its deployment in advanced CMOS nodes. In this paper, we propose a wavefront-based pixel inversion algorithm to quickly obtain inverse masks with a high aerial image quality. Further assisted by a flexible pattern simplification technique, we present effective SRAF generation and placement based on the calculated inverse mask. The proposed approach can be easily inserted prior to a conventional mask correction flow for subsequent concurrent optimizations of both drawn patterns and SRAFs. The innovative pixel inversion and pattern simplification techniques allow quality mask corrections as produced by inverse lithography while maintaining the convenience of standardized/validated process flows currently used in the industry.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jue-Chin Yu, Peichen Yu, and Hsueh-Yung Chao "Wavefront-based pixel inversion algorithm for generation of subresolution assist features," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 043014 (1 October 2011). https://doi.org/10.1117/1.3663249

Published: 1 October 2011

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