Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 12 · NO. 1 | January 2013
CONTENTS
IN THIS ISSUE

Editorial (1)
Editorial
J. Micro/Nanolith. MEMS MOEMS 12(1), 010101 (28 February 2013) https://doi.org/10.1117/1.JMM.12.1.010101
TOPICS: Mathematics, Lithography, Physics, Analytical research, Statistical analysis, Communication engineering, Data communications
Regular Articles
J. Micro/Nanolith. MEMS MOEMS 12(1), 013001 (2 January 2013) https://doi.org/10.1117/1.JMM.12.1.013001
J. Micro/Nanolith. MEMS MOEMS 12(1), 013002 (7 January 2013) https://doi.org/10.1117/1.JMM.12.1.013002
TOPICS: Silicon, Microelectromechanical systems, Etching, Semiconducting wafers, Photoresist materials, Oxides, Fabrication, Oxygen, Metals, Packaging
J. Micro/Nanolith. MEMS MOEMS 12(1), 013003 (17 January 2013) https://doi.org/10.1117/1.JMM.12.1.013003
TOPICS: Prototyping, Actuators, Scanning electron microscopy, Magnetism, Microactuators, Microelectromechanical systems, 3D microstructuring, Semiconducting wafers, Oxides, Surface micromachining
J. Micro/Nanolith. MEMS MOEMS 12(1), 013004 (17 January 2013) https://doi.org/10.1117/1.JMM.12.1.013004
TOPICS: Diffraction, Scatterometry, Error analysis, Computer simulations, Inverse optics, Geometrical optics, Algorithm development, Diffraction gratings, Critical dimension metrology, Optical testing
J. Micro/Nanolith. MEMS MOEMS 12(1), 013005 (25 January 2013) https://doi.org/10.1117/1.JMM.12.1.013005
TOPICS: Critical dimension metrology, Scanning electron microscopy, Image filtering, Edge roughness, Image analysis, Electron microscopes, Materials processing, Edge detection, Metrology, Lithography
J. Micro/Nanolith. MEMS MOEMS 12(1), 013006 (1 February 2013) https://doi.org/10.1117/1.JMM.12.1.013006
TOPICS: Electrodes, Scanners, Microopto electromechanical systems, Mirrors, Silicon, Actuators, Optical alignment, Capacitance, Semiconducting wafers, Micromirrors
J. Micro/Nanolith. MEMS MOEMS 12(1), 013007 (6 February 2013) https://doi.org/10.1117/1.JMM.12.1.013007
TOPICS: Extreme ultraviolet, Transmission electron microscopy, Metrology, Scanning electron microscopy, Particles, Photomasks, Multilayers, Ion beams, Smoothing, Molybdenum
J. Micro/Nanolith. MEMS MOEMS 12(1), 013008 (6 February 2013) https://doi.org/10.1117/1.JMM.12.1.013008
TOPICS: Spherical lenses, Monochromatic aberrations, Diffraction, Finite element methods, Photomasks, Wavefronts, Nanolithography, Lithography, Error analysis, Silicon
J. Micro/Nanolith. MEMS MOEMS 12(1), 013009 (11 February 2013) https://doi.org/10.1117/1.JMM.12.1.013009
TOPICS: Graphene, Resistance, Temperature metrology, Carbon, Electrodes, Metals, Environmental sensing, Silicon, Semiconducting wafers, Sensors
J. Micro/Nanolith. MEMS MOEMS 12(1), 013010 (11 February 2013) https://doi.org/10.1117/1.JMM.12.1.013010
TOPICS: Magnetism, Reticles, Electron beam lithography, Lithography, Semiconducting wafers, Light sources, Extreme ultraviolet, Spin polarization, Deep ultraviolet, Metals
J. Micro/Nanolith. MEMS MOEMS 12(1), 013011 (11 February 2013) https://doi.org/10.1117/1.JMM.12.1.013011
TOPICS: Prisms, Imaging systems, Lithography, Head, Control systems, Semiconducting wafers, Sapphire, Silica, Transducers, Prototyping
J. Micro/Nanolith. MEMS MOEMS 12(1), 013012 (11 February 2013) https://doi.org/10.1117/1.JMM.12.1.013012
TOPICS: Tin, Aluminum, Wafer bonding, Semiconducting wafers, Silicon, Scanning electron microscopy, Interfaces, Microelectromechanical systems, Roads, Nanolithography
J. Micro/Nanolith. MEMS MOEMS 12(1), 013013 (11 February 2013) https://doi.org/10.1117/1.JMM.12.1.013013
TOPICS: Semiconducting wafers, Diffraction, Inspection, Silicon, Etching, Wafer-level optics, Wafer testing, Scanning electron microscopy, Near infrared, Signal processing
J. Micro/Nanolith. MEMS MOEMS 12(1), 013014 (13 February 2013) https://doi.org/10.1117/1.JMM.12.1.013014
TOPICS: Tolerancing, Transistors, Lithography, Optical proximity correction, Photomasks, Logic, Critical dimension metrology, Manufacturing, Photovoltaics, Image processing
J. Micro/Nanolith. MEMS MOEMS 12(1), 013015 (6 March 2013) https://doi.org/10.1117/1.JMM.12.1.013015
J. Micro/Nanolith. MEMS MOEMS 12(1), 013016 (13 March 2013) https://doi.org/10.1117/1.JMM.12.1.013016
TOPICS: Mirrors, Copper, Actuators, Microopto electromechanical systems, Temperature metrology, Deformable mirrors, Ceramics, Mirror mounts, Manufacturing, Thermography
J. Micro/Nanolith. MEMS MOEMS 12(1), 013017 (20 March 2013) https://doi.org/10.1117/1.JMM.12.1.013017
TOPICS: Gold, Silicon, Chromium, Zinc oxide, Roentgenium, Biosensors, Phase velocity, Acoustics, Transducers, Reflectivity
J. Micro/Nanolith. MEMS MOEMS 12(1), 013018 (27 March 2013) https://doi.org/10.1117/1.JMM.12.1.013018
TOPICS: Scatterometry, Data modeling, Scanning electron microscopy, Electron beam lithography, Metrology, Critical dimension metrology, Spectroscopy, Chemical elements, Optical properties, Diffraction gratings
J. Micro/Nanolith. MEMS MOEMS 12(1), 013019 (28 March 2013) https://doi.org/10.1117/1.JMM.12.1.013019
TOPICS: Roentgenium, Zinc oxide, Thin films, Thin film devices, Silicon, Acoustics, Silicon films, Electrodes, Reflectivity, Metals
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