Model of curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist based on free volume theory

Nan Liu; Jingbei Liu; Jie Lin; Graham Davies; Peng Jin; Dou Zhang

doi:10.1117/1.JMM.12.2.023005

10 May 2013 Model of curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist based on free volume theory

Nan Liu, Jingbei Liu, Jie Lin, Graham Davies, Peng Jin, Dou Zhang

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 2, 023005 (May 2013). https://doi.org/10.1117/1.JMM.12.2.023005

Abstract

Free volume theory and a model of polymerization kinetics are introduced to predict and analyze the curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist. Curing shrinkage tests have been designed and performed to verify the accuracy of the model. The experimental results are in good agreement with the simulated results of the conversion behavior. The reaction coefficients of polymerization predicted by this model are essentially correct when compared to the classical experimental values. Moreover, the dynamic shrinkage during polymerization determined experimentally matches the simulated result predicted by our model.

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Nan Liu, Jingbei Liu, Jie Lin, Graham Davies, Peng Jin, and Dou Zhang "Model of curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist based on free volume theory," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(2), 023005 (10 May 2013). https://doi.org/10.1117/1.JMM.12.2.023005

Published: 10 May 2013

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