XSLOpenURL/10.1117/1.JMM.12.2.023015. It also appears in the October–December 2013 print issue with the special section.
This paper [J. Micro/Nanolith. MEMS MOEMS 12(2), 023015 (Apr–Jun 2013)] was mistakenly published as a regularly contributed paper in the April–June 2013 issue of JM3. It was intended to be published with the special section on “Advanced Fabrication of MEMS and Photonic Devices” guest edited by Freymann, Maher, and Suleski in the October-December 2013 issue of JM3. The paper can be found online at http://dx.doi.org/10.1117/1.JMM.12.2.023015. It also appears in the October–December 2013 print issue with the special section.