4 October 2013 Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers
Author Affiliations +
Abstract
This article [J. Micro/Nanolith. MEMS MOEMS. , 12, (3 ), 033020 (2013)] was originally published online on 25 September 2013 with errors in the authors’ names. The names originally appeared as Lakshminarayanan Sujatha, Murali Siddhartha Goutham, Mani Saravanan, and Varatharajan Subramani Selvakumar. The corrected names appear above. All online versions of the article were corrected on 27 September 2013. The article appears correctly in print.
Lakshminarayanan, Murali, Mani, and Subramani: Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers

This article [J. Micro/Nanolith. MEMS MOEMS, 12(3), 033020 (2013)] was originally published online on 25 September 2013 with errors in the authors’ names.

The names originally appeared as Lakshminarayanan Sujatha, Murali Siddhartha Goutham, Mani Saravanan, and Varatharajan Subramani Selvakumar. The corrected names appear above.

All online versions of the article were corrected on 27 September 2013. The article appears correctly in print.

© The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Lakshminarayanan Sujatha, Siddhartha G. Murali, Saravanan Mani, Selvakumar V. Subramani, "Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(4), 049801 (4 October 2013). https://doi.org/10.1117/1.JMM.12.4.049801 . Submission:
JOURNAL ARTICLE
2 PAGES


SHARE
RELATED CONTENT

Wafer bonding process for building MEMS devices
Proceedings of SPIE (June 23 2014)
Microvalve for SMA-based CHAD
Proceedings of SPIE (July 22 2003)
Tools and processes for MEMS and nanotechnology
Proceedings of SPIE (October 20 2000)

Back to Top