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27 November 2013 Cryogenic testing of a unimorph-type deformable mirror and theoretical material optimization
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The testing of a lightweight unimorph-type deformable mirror (DM) for wavefront correction in cryogenic instruments is reported. The presented mirror manufactured from the titanium alloy TiAl6V4 with a piezoelectric disk actuator was cooled to 86 K and characterized for thermally induced deformation and the achievable piezoelectric stroke between room temperature and 86 K. Through a finite element analysis, we obtained a first approximation in determining the exact temperature-dependent coefficient of thermal expansion (CTE) of the piezo material PIC151. Simulations were based on dilatometer measurements of the CTE of the TiAl6V4 mirror base between room temperature and 86 K. These investigations will enable the improvement of the athermal design of a unimorph-type DM.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2014/$25.00 © 2014 SPIE
Matthias Goy, Claudia Reinlein, Jan Kinast, and Nicolas Lange "Cryogenic testing of a unimorph-type deformable mirror and theoretical material optimization," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(1), 011107 (27 November 2013).
Published: 27 November 2013


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