UV LED lithography with digitally tunable exposure dose

Murat Kaya Yapici; Ilyas Farhat

doi:10.1117/1.JMM.13.4.043004

21 October 2014 UV LED lithography with digitally tunable exposure dose

Murat Kaya Yapici, Ilyas Farhat

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 4, 043004 (October 2014). https://doi.org/10.1117/1.JMM.13.4.043004

Abstract

This paper reports the development of a low-cost, portable, light-emitting diode (LED)-based ultraviolet (UV) exposure system. The major system components include UV-LEDs, a microcontroller, a digital-to-analog converter, and LED control circuitry. Through its front panel with a liquid crystal display and keypad, the UV-LED lithography system is able to receive user-defined values for exposure time and power, which allows the exposure dose to be tunable on demand. Compared to standard mask aligners, the UV-LED lithography system is a fraction of the cost, is simpler to construct using off-the shelf components, and does not require a complex infrastructure to operate. Such a reduction in system cost and complexity renders UV-LED lithography a perfect candidate for microlithography with large process windows typically suitable for MEMS, microfluidics applications.

Citation Download Citation

Murat Kaya Yapici and Ilyas Farhat "UV LED lithography with digitally tunable exposure dose," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(4), 043004 (21 October 2014). https://doi.org/10.1117/1.JMM.13.4.043004

Published: 21 October 2014

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