Electromechanical resonators based on electrospun ZnO nanofibers

Somayeh Fardindoost; Saeed Mohammadi; Azam Iraji zad; Reza Sarvari; Seyed Peyman Shariatpanahi

doi:10.1117/1.JMM.13.4.043011

11 November 2014 Electromechanical resonators based on electrospun ZnO nanofibers

Somayeh Fardindoost, Saeed Mohammadi, Azam Iraji zad, Reza Sarvari, Seyed Peyman Shariatpanahi

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 4, 043011 (November 2014). https://doi.org/10.1117/1.JMM.13.4.043011

Abstract

We present fabrication, characterization, and experimental results describing electrical actuation and readout of the mechanical vibratory response of electrospun ZnO nanofibers. For a fiber with an approximate radius of 200 nm and a length of 70 μm, a resonance frequency around 3.62 MHz with a quality factor (Q) of about 235 in air at ambient conditions is observed. It is shown that the measured frequency of the resonance is consistent with results from finite element simulations. Also, the measurements were performed in an enclosed chamber with controlled levels of ethanol vapor. The adsorption of ethanol causes a shift in the resonance frequency of the fibers, which can be related to the concentration of ethanol vapor for sensing purposes.

Citation Download Citation

Somayeh Fardindoost, Saeed Mohammadi, Azam Iraji zad, Reza Sarvari, and Seyed Peyman Shariatpanahi "Electromechanical resonators based on electrospun ZnO nanofibers," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(4), 043011 (11 November 2014). https://doi.org/10.1117/1.JMM.13.4.043011

Published: 11 November 2014

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