Fabrication and characterization of an all optically addressed micromirror array

Vaibhav Mathur; Shiva R. Vangala; Jed Khoury

doi:10.1117/1.JMM.14.1.015501

20 January 2015 Fabrication and characterization of an all optically addressed micromirror array

Vaibhav Mathur, Shiva R. Vangala, Jed Khoury

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 1, 015501 (January 2015). https://doi.org/10.1117/1.JMM.14.1.015501

Abstract

We describe the fabrication process for an optically addressed adaptive optics array. The device consists of a micromirror array cascaded directly on wafer fused gallium arsenide (GaAs)-gallium phosphide (GaP) photodiodes. Optically addressing a photodiode generates a photocurrent which in turn causes a voltage drop across the cascaded mirror via an integrated thin film resistor. This architecture allows parallel optical addressing of individual elements without the need for wire bonding each pixel, which can enable higher density segmented type arrays. We first describe a fabrication process for releasing a free-standing array of low stress Si_xN micromirrors on an indium phosphide (InP) support substrate. We then present a process for transferring GaAs p-i-n photodiodes on a transparent GaP support substrate using a specially designed wafer fusion fixture. The two samples when stacked together and electrically connected via a specially formulated and patterned semiconductive SU-8 resist form the final device. We report mirror displacements of up to 500 nm using this technique while requiring an optical signal as low as 150 μW.

Citation Download Citation

Vaibhav Mathur, Shiva R. Vangala, and Jed Khoury "Fabrication and characterization of an all optically addressed micromirror array," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(1), 015501 (20 January 2015). https://doi.org/10.1117/1.JMM.14.1.015501

Published: 20 January 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $24.00

Non-members: $28.00 ADD TO CART

JOURNAL ARTICLE
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Resistors

Micromirrors

Mirrors

Photodiodes

Semiconducting wafers

Gallium arsenide

Actuators

Show All Keywords

Keywords/Phrases

Search In:

Publication Years