Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter

Kareem Khirallah; Mohamed A. Swillam

doi:10.1117/1.JMM.14.2.025501

6 April 2015 Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter

Kareem Khirallah, Mohamed A. Swillam

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 2, 025501 (April 2015). https://doi.org/10.1117/1.JMM.14.2.025501

Abstract

Nanoelectromechanical systems (NEMS) design for active resonance frequency tuning of plasmonics optical filter is proposed and discussed. The design is based on controlling the relative position between two stubs in a metal–insulator–metal plasmonics waveguide using NEMS technology. The analysis of the optical design as well as the mechanical design is performed. Finally, a reasonable fabrication process of the device is proposed. For the suggested mechanical design parameters, the optical resonance wavelength can be tuned from 1.45 to 1.65 μm using 7V_DC actuation voltage.

Citation Download Citation

Kareem Khirallah and Mohamed A. Swillam "Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025501 (6 April 2015). https://doi.org/10.1117/1.JMM.14.2.025501

Published: 6 April 2015

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