Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements

Quang Duc Pham; Yoshio Hayasaki

doi:10.1117/1.JMM.14.4.041305

10 August 2015 Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements

Quang Duc Pham, Yoshio Hayasaki

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 4, 041305 (August 2015). https://doi.org/10.1117/1.JMM.14.4.041305

Abstract

We demonstrated optical-frequency-comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a photodetector for measurement of large-depth objects. Use of two harmonic frequencies allowed us to measure an object with a meter-order depth without any 2π-phase ambiguity. Profilometry with 10×10 pixels using the 12th and 13th harmonics of the fundamental frequency of 76 MHz gave a noise level of ∼10 μm in terms of standard deviation. Linking the measurement results obtained using one and two frequencies gave an axial dynamic range of ∼3.9×10⁵.

Citation Download Citation

Quang Duc Pham and Yoshio Hayasaki "Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(4), 041305 (10 August 2015). https://doi.org/10.1117/1.JMM.14.4.041305

Published: 10 August 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available