Triple patterning lithography layout decomposition using end-cutting

Bei Yu; Subhendu Roy; Jhih-Rong Gao; David Z. Pan

doi:10.1117/1.JMM.14.1.011002

4 November 2014 Triple patterning lithography layout decomposition using end-cutting

Bei Yu, Subhendu Roy, Jhih-Rong Gao, David Z. Pan

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 1, 011002 (November 2014). https://doi.org/10.1117/1.JMM.14.1.011002

Abstract

Triple patterning lithography (TPL) is one of the most promising techniques in the 14-nm logic node and beyond. Conventional LELELE type TPL technology suffers from native conflict and overlapping problems. Recently, as an alternative process, TPL with end-cutting (LELE-EC) was proposed to overcome the limitations of LELELE manufacturing. In the LELE-EC process, the first two masks are LELE type double patterning, while the third mask is used to generate the end-cuts. Although the layout decomposition problem for LELELE has been well studied in the literature, only a few attempts have been made to address the LELE-EC layout decomposition problem. We propose a comprehensive study for LELE-EC layout decomposition. Layout graph and end-cut graph are constructed to extract all the geometrical relationships of both input layout and end-cut candidates. Based on these graphs, integer linear programming is formulated to minimize the conflict and the stitch numbers. The experimental results demonstrate the effectiveness of the proposed algorithms.

Citation Download Citation

Bei Yu, Subhendu Roy, Jhih-Rong Gao, and David Z. Pan "Triple patterning lithography layout decomposition using end-cutting," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(1), 011002 (4 November 2014). https://doi.org/10.1117/1.JMM.14.1.011002

Published: 4 November 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available