Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 14 · NO. 4 | October 2015
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 14(4), 040101 (11 November 2015) https://doi.org/10.1117/1.JMM.14.4.040101
TOPICS: Chemistry, Nanolithography, Lenses, Optical engineering, Photoresist materials, Polymers, Chemical elements, Molecules, Microelectromechanical systems, Microopto electromechanical systems
Special Section on the Interface of Holography and MEMS
J. Micro/Nanolith. MEMS MOEMS 14(4), 041301 (30 November 2015) https://doi.org/10.1117/1.JMM.14.4.041301
TOPICS: Holography, Microelectromechanical systems, Digital holography, Microopto electromechanical systems, Interfaces, Physics, Metrology, Spatial light modulators, 3D displays, Computer engineering
J. Micro/Nanolith. MEMS MOEMS 14(4), 041302 (25 July 2015) https://doi.org/10.1117/1.JMM.14.4.041302
TOPICS: LCDs, Digital micromirror devices, Polymethylmethacrylate, Maskless lithography, Lithography, Polymers, Holography, Diffractive optical elements, Mirrors, Light sources
J. Micro/Nanolith. MEMS MOEMS 14(4), 041303 (27 July 2015) https://doi.org/10.1117/1.JMM.14.4.041303
TOPICS: Holography, 3D image reconstruction, 3D displays, Spatial light modulators, Diffraction, Holograms, 3D image processing, Image acquisition, Imaging systems, Image quality
J. Micro/Nanolith. MEMS MOEMS 14(4), 041304 (3 August 2015) https://doi.org/10.1117/1.JMM.14.4.041304
TOPICS: Digital holography, Holograms, Image compression, Semiconducting wafers, Wavelets, 3D image reconstruction, Holography, Wavelet transforms, Reconstruction algorithms, CMOS devices
J. Micro/Nanolith. MEMS MOEMS 14(4), 041305 (10 August 2015) https://doi.org/10.1117/1.JMM.14.4.041305
TOPICS: Frequency combs, Digital micromirror devices, Compressed sensing, Cameras, Digital cameras, Radio optics, Mirrors, Photodetectors, Phase measurement, Femtosecond phenomena
J. Micro/Nanolith. MEMS MOEMS 14(4), 041306 (11 August 2015) https://doi.org/10.1117/1.JMM.14.4.041306
TOPICS: Microelectromechanical systems, Cameras, Holography, Holograms, Crystals, Scattering, Holographic interferometry, Laser crystals, Digital holography, Interferometry
J. Micro/Nanolith. MEMS MOEMS 14(4), 041307 (14 August 2015) https://doi.org/10.1117/1.JMM.14.4.041307
TOPICS: Spatial light modulators, Holograms, Imaging systems, Digital holography, Holography, 3D image reconstruction, Polarization, Confocal microscopy, Spherical lenses, Multiplexing
J. Micro/Nanolith. MEMS MOEMS 14(4), 041308 (27 August 2015) https://doi.org/10.1117/1.JMM.14.4.041308
TOPICS: Modulators, Waveguides, Holography, Video, Acoustics, Control systems, Spatial frequencies, Polarization, Prisms, Transducers
J. Micro/Nanolith. MEMS MOEMS 14(4), 041309 (11 September 2015) https://doi.org/10.1117/1.JMM.14.4.041309
TOPICS: Thin films, Sensors, Mirrors, Silicon films, Atomic force microscopy, Interferometry, Polymers, Silicon, Polymer thin films, RGB color model
J. Micro/Nanolith. MEMS MOEMS 14(4), 041310 (16 September 2015) https://doi.org/10.1117/1.JMM.14.4.041310
TOPICS: Holograms, Holography, Spatial light modulators, Diffraction, Modulation, Modulators, Phase shift keying, Reconstruction algorithms, Holography applications, Phase modulation
J. Micro/Nanolith. MEMS MOEMS 14(4), 041311 (16 September 2015) https://doi.org/10.1117/1.JMM.14.4.041311
TOPICS: Spatial light modulators, Holography, Holograms, Aberration correction, Diffraction, Point spread functions, Digital holography, Wavefronts, Lenses, Optical filters
J. Micro/Nanolith. MEMS MOEMS 14(4), 041312 (1 October 2015) https://doi.org/10.1117/1.JMM.14.4.041312
J. Micro/Nanolith. MEMS MOEMS 14(4), 041313 (20 October 2015) https://doi.org/10.1117/1.JMM.14.4.041313
TOPICS: Digital holography, Holography, Microscopy, Microlens, Holograms, Numerical simulations, 3D image reconstruction, Optical testing, Digital recording, Charge-coupled devices
J. Micro/Nanolith. MEMS MOEMS 14(4), 041314 (18 November 2015) https://doi.org/10.1117/1.JMM.14.4.041314
TOPICS: Microelectromechanical systems, Holograms, Digital holography, Holography, Image processing, 3D image reconstruction, Digital recording, Diffraction, Microscopes, Microscopy
Lithography
J. Micro/Nanolith. MEMS MOEMS 14(4), 043501 (7 October 2015) https://doi.org/10.1117/1.JMM.14.4.043501
TOPICS: Extreme ultraviolet, Pellicles, Reflectivity, Extreme ultraviolet lithography, Semiconducting wafers, Radiation effects, Deep ultraviolet, Photomasks, Silicon carbide, Mirrors
J. Micro/Nanolith. MEMS MOEMS 14(4), 043502 (13 October 2015) https://doi.org/10.1117/1.JMM.14.4.043502
TOPICS: Extreme ultraviolet, Scattering, Electron beams, Extreme ultraviolet lithography, Photons, Photoresist materials, Ionization, Ellipsometry, Monte Carlo methods, Solid modeling
J. Micro/Nanolith. MEMS MOEMS 14(4), 043503 (14 October 2015) https://doi.org/10.1117/1.JMM.14.4.043503
TOPICS: Antimony, Polymers, Molecules, Chromium, Extreme ultraviolet, Polymerization, Lithography, Bromine, Scanning electron microscopy, Metals
J. Micro/Nanolith. MEMS MOEMS 14(4), 043504 (20 October 2015) https://doi.org/10.1117/1.JMM.14.4.043504
TOPICS: Polarization, Lithography, Photomasks, Imaging systems, Diffraction, Lithographic illumination, Computer simulations, Image analysis, Zernike polynomials, Image processing
J. Micro/Nanolith. MEMS MOEMS 14(4), 043505 (2 November 2015) https://doi.org/10.1117/1.JMM.14.4.043505
TOPICS: Semiconductor lasers, Microlens, Optical lithography, Lithography, Excimer lasers, Ultraviolet radiation, Optical simulations, Metals, Zemax, Photomasks
J. Micro/Nanolith. MEMS MOEMS 14(4), 043506 (9 November 2015) https://doi.org/10.1117/1.JMM.14.4.043506
TOPICS: Tin, Line edge roughness, Photoresist materials, Optical lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Edge roughness, Crystals, Optical filters
J. Micro/Nanolith. MEMS MOEMS 14(4), 043507 (23 November 2015) https://doi.org/10.1117/1.JMM.14.4.043507
TOPICS: Electroluminescence, Source mask optimization, Photomasks, Optical proximity correction, Computational lithography, Diffractive optical elements, Metals, Lithography, Manufacturing, Optimization (mathematics)
J. Micro/Nanolith. MEMS MOEMS 14(4), 043508 (18 December 2015) https://doi.org/10.1117/1.JMM.14.4.043508
TOPICS: Electrodes, Lithography, Tolerancing, 3D modeling, Semiconducting wafers, Dielectrics, Electron beam lithography, Beam shaping, Manufacturing, Mechanical engineering
J. Micro/Nanolith. MEMS MOEMS 14(4), 043509 (21 December 2015) https://doi.org/10.1117/1.JMM.14.4.043509
TOPICS: Photoresist materials, Polarization, Resolution enhancement technologies, Lithography, Liquid crystals, Atomic force microscopy, Polarizers, Polymers, Beam splitters, Spiral phase plates
J. Micro/Nanolith. MEMS MOEMS 14(4), 043510 (21 December 2015) https://doi.org/10.1117/1.JMM.14.4.043510
TOPICS: Imaging systems, Prisms, Interfaces, Solids, Lithography, Scanning electron microscopy, Optical lithography, Dielectrics, Control systems, Reflectors
J. Micro/Nanolith. MEMS MOEMS 14(4), 043511 (24 December 2015) https://doi.org/10.1117/1.JMM.14.4.043511
TOPICS: Palladium, Platinum, Magnesium, Extreme ultraviolet, Solids, Metals, Lithography, Extreme ultraviolet lithography, Carbon monoxide, Carbonates
Metrology
J. Micro/Nanolith. MEMS MOEMS 14(4), 044001 (12 November 2015) https://doi.org/10.1117/1.JMM.14.4.044001
TOPICS: Scanning electron microscopy, Metrology, Error analysis, Data modeling, Standards development, 3D metrology, Monte Carlo methods, Indium arsenide, Electron microscopes, Calibration
Microfabrication
J. Micro/Nanolith. MEMS MOEMS 14(4), 044501 (13 October 2015) https://doi.org/10.1117/1.JMM.14.4.044501
TOPICS: Germanium, Atomic layer deposition, Aluminum, Field effect transistors, Interfaces, Dielectrics, Molybdenum, Oxides, Gallium arsenide, Silicon
J. Micro/Nanolith. MEMS MOEMS 14(4), 044502 (21 October 2015) https://doi.org/10.1117/1.JMM.14.4.044502
TOPICS: Etching, Polymers, Diamond, Nanoimprint lithography, Distortion, Anisotropic etching, Oxides, Image processing, 3D modeling, 3D image processing
J. Micro/Nanolith. MEMS MOEMS 14(4), 044503 (23 October 2015) https://doi.org/10.1117/1.JMM.14.4.044503
TOPICS: Copper, Thin films, Aluminum, Laser ablation, Pulsed laser operation, Neodymium, YAG lasers, Scanning electron microscopy, Absorption, Plasma
J. Micro/Nanolith. MEMS MOEMS 14(4), 044504 (27 October 2015) https://doi.org/10.1117/1.JMM.14.4.044504
TOPICS: Polarization, Holography, Chalcogenides, Laser beam diagnostics, Thin films, Optical components, Dielectrophoresis, Birefringence, Diffraction gratings, Continuous wave operation
J. Micro/Nanolith. MEMS MOEMS 14(4), 044505 (28 October 2015) https://doi.org/10.1117/1.JMM.14.4.044505
TOPICS: Directed self assembly, Etching, Polymethylmethacrylate, Plasma, Carbon monoxide, Picosecond phenomena, Lithography, Ions, Plasma treatment, Chemistry
J. Micro/Nanolith. MEMS MOEMS 14(4), 044506 (10 December 2015) https://doi.org/10.1117/1.JMM.14.4.044506
TOPICS: Etching, Silicon, Nanolithography, Deep reactive ion etching, Plasma etching, Electron beam lithography, Cryogenics, Plasma, Hydrogen, Manufacturing
J. Micro/Nanolith. MEMS MOEMS 14(4), 044507 (29 December 2015) https://doi.org/10.1117/1.JMM.14.4.044507
TOPICS: Waveguides, Microwave radiation, Terahertz radiation, Semiconducting wafers, Antennas, Optical lithography, Electronic filtering, Bandpass filters, Measurement devices, Silver
Microelectromechanical Systems (MEMS)
J. Micro/Nanolith. MEMS MOEMS 14(4), 045001 (26 October 2015) https://doi.org/10.1117/1.JMM.14.4.045001
TOPICS: Microfluidics, Fluid dynamics, Silicon, Semiconducting wafers, Inspection, Liquids, Biomedical optics, Particles, Dielectrophoresis, Capillaries
J. Micro/Nanolith. MEMS MOEMS 14(4), 045002 (18 December 2015) https://doi.org/10.1117/1.JMM.14.4.045002
TOPICS: Oscillators, Gyroscopes, Nickel, Iron, Electrodes, Scanning electron microscopy, Instrument modeling, Copper, Fabrication, Computer aided design
Micro-optoelectromechanical Systems (MOEMS)
J. Micro/Nanolith. MEMS MOEMS 14(4), 045501 (28 October 2015) https://doi.org/10.1117/1.JMM.14.4.045501
TOPICS: Refractometry, Liquids, Sensors, Resonators, Mirrors, Silicon, Optical fibers, Refractive index, Water, Capillaries
Errata
J. Micro/Nanolith. MEMS MOEMS 14(4), 049801 (17 August 2015) https://doi.org/10.1117/1.JMM.14.4.049801
TOPICS: Holography, Interfaces, Microelectromechanical systems, Cameras, Frequency combs, Digital cameras, Digital micromirror devices
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