Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components

Yingtao Tian; Xiaobang Shang; Yi Wang; Michael J. Lancaster

doi:10.1117/1.JMM.14.4.044507

29 December 2015 Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components

Yingtao Tian, Xiaobang Shang, Yi Wang, Michael J. Lancaster

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 4, 044507 (December 2015). https://doi.org/10.1117/1.JMM.14.4.044507

Abstract

This paper provides a systematic review of the technical issues of SU8 fabrication for millimeter-wave and terahertz components based on research carried out at the University of Birmingham in the past decade. A design-for-manufacturability approach is followed. The flexibility of the SU8 process enables many device structures. Challenges and problems during fabrication will be discussed and demonstrated with examples. The measurement of the devices is also a significant challenge when the critical dimensions of the device shrink and special testing fixtures are needed in some cases. Finally, a brief overview of the issues discussed above is given for future guidance.

Citation Download Citation

Yingtao Tian, Xiaobang Shang, Yi Wang, and Michael J. Lancaster "Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(4), 044507 (29 December 2015). https://doi.org/10.1117/1.JMM.14.4.044507

Published: 29 December 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available