Process development and edge-placement yield modeling of alternating-material self-aligned multiple patterning

Ting Han; Hongyi Liu; Yijian Chen

doi:10.1117/1.JMM.15.3.031609

29 September 2016 Process development and edge-placement yield modeling of alternating-material self-aligned multiple patterning

Ting Han, Hongyi Liu, Yijian Chen

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 3, 031609 (September 2016). https://doi.org/10.1117/1.JMM.15.3.031609

Abstract

We propose and discuss a modular technology to reduce the edge-placement-error effect by combining selective etching and alternating-material (dual-material) self-aligned multiple patterning (altSAMP) processes. A geometrical cut-process yield model considering the joint effect of overlay errors, cut-hole, and line CD variations is developed to analyze its patterning performance. In addition to the contributions from the above three process variations, the impacts of key control parameters (such as cut-hole overhang and etching selectivity) on the patterning yield are examined. It is shown that the optimized altSAMP patterning process significantly improves the patterning yield compared with conventional SAMP processes, especially when the half pitch of device patterns is driven down to 7 nm and below. Moreover, the corresponding layout decomposition and synthesis strategy are also discussed. The experimental results of altSAMP process development and material screening are reported.

Citation Download Citation

Ting Han, Hongyi Liu, and Yijian Chen "Process development and edge-placement yield modeling of alternating-material self-aligned multiple patterning," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(3), 031609 (29 September 2016). https://doi.org/10.1117/1.JMM.15.3.031609

Published: 29 September 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available