CONFERENCE PROCEEDINGS
Advanced Search
Home > Journals > J. Micro/Nanolith. MEMS MOEMS > Volume 16 > Issue 2 > Article
Open Access
19 June 2017 Multiple-instrument evaluation of the consistency and long-term stability of tip width calibration for critical dimension atomic force microscopy
Ronald G. Dixson, Ndubuisi G. Orji
Author Affiliations +
Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 2, 024003 (June 2017). https://doi.org/10.1117/1.JMM.16.2.024003
Abstract
Since 2004, standards for calibration of critical dimension atomic force microscope (CD-AFM) tip width have been available both commercially and through the National Metrology Institutes, such as the National Institute of Standards and Technology in the United States. There have been interlaboratory and intermethod comparisons performed on such samples, but less attention has been paid to the long-term stability of standards and monitoring for damage, wear, or contamination. Using three different CD-AFM instruments, we have tested the consistency and long-term stability of two independent reference calibrations for CD-AFM tip width. Both of these tip width calibrations were based on independently implemented transmission electron microscope reference measurements. There were circumstances in which damage occurred or samples needed to be cleaned. Nevertheless, our results show agreement within the uncertainties and stability over a period exceeding 10 years.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE) 1932-5150/2017/$25.00 © 2017 SPIE
Citation Download Citation
Ronald G. Dixson and Ndubuisi G. Orji "Multiple-instrument evaluation of the consistency and long-term stability of tip width calibration for critical dimension atomic force microscopy," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(2), 024003 (19 June 2017). https://doi.org/10.1117/1.JMM.16.2.024003
Received: 6 March 2017; Accepted: 2 June 2017; Published: 19 June 2017
JOURNAL ARTICLE
 8 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Calibration
Atomic force microscopy
Standards development
Atomic force microscope
Contamination
Electron microscopes
Metrology
CHORUS Article. This article was made freely available starting 19 June 2018
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top