Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 17 · NO. 1 | January 2018
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 17(1), 010101 (26 January 2018) https://doi.org/10.1117/1.JMM.17.1.010101
TOPICS: Data archive systems, Materials processing, Beryllium
J. Micro/Nanolith. MEMS MOEMS 17(1), 010102 (19 January 2018) https://doi.org/10.1117/1.JMM.17.1.010102
TOPICS: Lithium, Microelectromechanical systems, Microopto electromechanical systems, Sun, Fluctuations and noise
Lithography
J. Micro/Nanolith. MEMS MOEMS 17(1), 013501 (2 January 2018) https://doi.org/10.1117/1.JMM.17.1.013501
TOPICS: Lithography, Nanolithography, Nanostructures, Gold, Fabrication, Chromium, Scanning electron microscopy, Optical lithography, Plasmonics, Edge roughness
J. Micro/Nanolith. MEMS MOEMS 17(1), 013502 (2 January 2018) https://doi.org/10.1117/1.JMM.17.1.013502
TOPICS: Optical proximity correction, Back end of line, Semiconducting wafers, Optical lithography, Photomasks, Diffraction, Lithography, Lithographic illumination, Optical instrument design, Instrumentation engineering
J. Micro/Nanolith. MEMS MOEMS 17(1), 013503 (18 January 2018) https://doi.org/10.1117/1.JMM.17.1.013503
TOPICS: Metals, Standards development, Electronic design automation, Optical lithography, Back end of line, Switching, CMOS technology, Lithography, Front end of line, Integrated circuit design
J. Micro/Nanolith. MEMS MOEMS 17(1), 013504 (25 January 2018) https://doi.org/10.1117/1.JMM.17.1.013504
TOPICS: Critical dimension metrology, Photoresist materials, Reflection, Printing, Silicon, Cadmium, Solids, 3D modeling
J. Micro/Nanolith. MEMS MOEMS 17(1), 013505 (6 March 2018) https://doi.org/10.1117/1.JMM.17.1.013505
TOPICS: Etching, Scanning electron microscopy, Data modeling, Optical proximity correction, Optical lithography, Performance modeling, Calibration, Anisotropic etching, Artificial neural networks, 3D modeling
J. Micro/Nanolith. MEMS MOEMS 17(1), 013506 (14 March 2018) https://doi.org/10.1117/1.JMM.17.1.013506
TOPICS: Stochastic processes, Photons, Photoresist processing, Data modeling, Line edge roughness, Photoresist materials, Semiconducting wafers, Critical dimension metrology, Quenching (fluorescence), Image processing
J. Micro/Nanolith. MEMS MOEMS 17(1), 013507 (19 March 2018) https://doi.org/10.1117/1.JMM.17.1.013507
TOPICS: Fin field effect transistors, Line edge roughness, Doping, Optical lithography, Transistors, Computer simulations, Field effect transistors, Line width roughness, CMOS technology, Device simulation
J. Micro/Nanolith. MEMS MOEMS 17(1), 013508 (23 March 2018) https://doi.org/10.1117/1.JMM.17.1.013508
TOPICS: Directed self assembly, Connectors, Global Positioning System, Curium, Model-based design, Detection and tracking algorithms, Calibration, Monte Carlo methods, Data modeling, Failure analysis
Metrology
J. Micro/Nanolith. MEMS MOEMS 17(1), 014001 (24 February 2018) https://doi.org/10.1117/1.JMM.17.1.014001
TOPICS: Diffraction, Diffraction gratings, Extreme ultraviolet, Sensors, Charge-coupled devices, CCD cameras, Laser scattering, CCD image sensors, Scatterometry, Scanning electron microscopy
Microfabrication
J. Micro/Nanolith. MEMS MOEMS 17(1), 014501 (9 January 2018) https://doi.org/10.1117/1.JMM.17.1.014501
TOPICS: Copper, Silicon, Resistance, Electroplating, Etching, Diffractive optical elements, Wet etching, Semiconducting wafers, Signal to noise ratio, Plating
Microelectromechanical systems (MEMS)
J. Micro/Nanolith. MEMS MOEMS 17(1), 015001 (16 January 2018) https://doi.org/10.1117/1.JMM.17.1.015001
TOPICS: Gyroscopes, Resonators, Electrodes, Microelectromechanical systems, Silicon, Finite element methods, Glasses, Manufacturing, Prototyping, Semiconducting wafers
J. Micro/Nanolith. MEMS MOEMS 17(1), 015002 (12 February 2018) https://doi.org/10.1117/1.JMM.17.1.015002
TOPICS: Semiconducting wafers, Silicon, Microelectromechanical systems, Etching, Photomasks, Acoustics, Photoresist materials, Oxides, Dry etching, Wet etching
J. Micro/Nanolith. MEMS MOEMS 17(1), 015003 (14 February 2018) https://doi.org/10.1117/1.JMM.17.1.015003
TOPICS: Transducers, Etching, Semiconducting wafers, Finite element methods, Electrodes, Copper, Ultrasonics, Ultrasonography, Titanium, Acoustics
J. Micro/Nanolith. MEMS MOEMS 17(1), 015004 (5 March 2018) https://doi.org/10.1117/1.JMM.17.1.015004
TOPICS: Microactuators, Capacitance, Actuators, Silicon, Photomasks, Deep reactive ion etching, Calibration, MATLAB, Communication engineering, Statistical analysis
J. Micro/Nanolith. MEMS MOEMS 17(1), 015005 (23 March 2018) https://doi.org/10.1117/1.JMM.17.1.015005
TOPICS: Microelectromechanical systems, Silicon, Heart, Aluminum nitride, Energy harvesting, Thin films, Polymers, Semiconducting wafers, Beam shaping, Oxides
Micro-optoelectromechanical systems (MOEMS)
J. Micro/Nanolith. MEMS MOEMS 17(1), 015501 (25 January 2018) https://doi.org/10.1117/1.JMM.17.1.015501
TOPICS: Laser scanners, Laser optics, Actuators, 3D scanning, Optical simulations, Finite element methods, Microopto electromechanical systems, Refraction, Polygon scanners, Scalable video coding
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