journal of micro nanolithography mems and moems
VOL. 17 · NO. 2 | April 2018
J. Micro/Nanolith. MEMS MOEMS 17(2), 020101 (3 May 2018)
TOPICS: Stochastic processes, Lithography, Optical lithography, Photons, Molecules, Semiconductors, Materials processing, Metrology, Etching, Extreme ultraviolet lithography
Review Articles
J. Micro/Nanolith. MEMS MOEMS 17(2), 020901 (27 April 2018)
TOPICS: Reticles, Semiconductors, Sensors, Microelectronics, Manufacturing, Air contamination, Semiconductor manufacturing, Metals, Semiconducting wafers, Electric field sensors
J. Micro/Nanolith. MEMS MOEMS 17(2), 023501 (11 April 2018)
TOPICS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography
Ling Ma, Qiang Wu, Lisong Dong, Qiaoqiao Li, Yayi Wei, Tianchun Ye
J. Micro/Nanolith. MEMS MOEMS 17(2), 023502 (23 April 2018)
TOPICS: Semiconducting wafers, Particles, Optical lithography, Nitrogen, Photomasks, Semiconductor manufacturing, Lithium, Lithography, Fluid dynamics, Photoresist materials
J. Micro/Nanolith. MEMS MOEMS 17(2), 023503 (28 April 2018)
TOPICS: Calibration, Data modeling, Process modeling, Autoregressive models, Lithography, Photomasks, Statistical modeling, Monte Carlo methods, Photoresist processing, Optical proximity correction
Jiyeah Rhie, Dukhyung Lee, Young-Mi Bahk, Jeeyoon Jeong, Geunchang Choi, Youjin Lee, Sunghwan Kim, Seunghun Hong, Dai-Sik Kim
J. Micro/Nanolith. MEMS MOEMS 17(2), 023504 (3 May 2018)
TOPICS: Photoresist materials, Etching, Scanning electron microscopy, Metals, Atomic layer deposition, Ion beams, Chromium, Photomasks, Gold, Lithography
J. Micro/Nanolith. MEMS MOEMS 17(2), 023505 (10 May 2018)
TOPICS: Absorption, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Tin, Zirconium, Metals, Lithography, Oxides, Chemical elements
Tien-Chan Chang, Chun-An Liao, Zhi-Yu Lin, Yiin-Kuen Fuh
J. Micro/Nanolith. MEMS MOEMS 17(2), 024001 (10 April 2018)
TOPICS: Composites, Graphene, Interfaces, Thermal effects, Field effect transistors, Anisotropy, Electronic components, Raman spectroscopy, Particles, Transmission electron microscopy
Microelectromechanical systems (MEMS)
Yuying Chiang, Chingfu Tsou, Bi-Chang Chen, Ruey-Hwang Chou
J. Micro/Nanolith. MEMS MOEMS 17(2), 025001 (12 April 2018)
TOPICS: Electrodes, Luminescence, Lung cancer, Microscopes, Diffusion, Cancer, Glasses, Image processing, Solids, Optical lithography
J. Micro/Nanolith. MEMS MOEMS 17(2), 025002 (14 May 2018)
TOPICS: Microfluidics, 3D printing, Printing, Finite element methods, Computer aided design, Synthetic aperture radar, Numerical simulations, 3D modeling, Chemical analysis, Diffusion
Micro-optoelectromechanical systems (MOEMS)
Matthew Hamblin, Thane Downing, Sophia Anderson, Erik Hamilton, Doyoung Kim, Aaron Hawkins
J. Micro/Nanolith. MEMS MOEMS 17(2), 025501 (23 April 2018)
TOPICS: Antireflective coatings, Reflectivity, Coating, Silicon, Reflection, Liquids, Thin films, Etching, Polishing, Absorption
Back to Top