Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 17 · NO. 2 | April 2018
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 17(2), 020101 (3 May 2018) https://doi.org/10.1117/1.JMM.17.2.020101
TOPICS: Stochastic processes, Lithography, Optical lithography, Photons, Molecules, Semiconductors, Materials processing, Metrology, Etching, Extreme ultraviolet lithography
Review Articles
J. Micro/Nanolith. MEMS MOEMS 17(2), 020901 (27 April 2018) https://doi.org/10.1117/1.JMM.17.2.020901
TOPICS: Reticles, Semiconductors, Sensors, Microelectronics, Manufacturing, Air contamination, Semiconductor manufacturing, Metals, Semiconducting wafers, Electric field sensors
Lithography
J. Micro/Nanolith. MEMS MOEMS 17(2), 023501 (11 April 2018) https://doi.org/10.1117/1.JMM.17.2.023501
TOPICS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography
J. Micro/Nanolith. MEMS MOEMS 17(2), 023502 (23 April 2018) https://doi.org/10.1117/1.JMM.17.2.023502
TOPICS: Semiconducting wafers, Particles, Optical lithography, Nitrogen, Photomasks, Semiconductor manufacturing, Lithium, Lithography, Fluid dynamics, Photoresist materials
J. Micro/Nanolith. MEMS MOEMS 17(2), 023503 (28 April 2018) https://doi.org/10.1117/1.JMM.17.2.023503
TOPICS: Calibration, Data modeling, Process modeling, Autoregressive models, Lithography, Photomasks, Statistical modeling, Monte Carlo methods, Photoresist processing, Optical proximity correction
J. Micro/Nanolith. MEMS MOEMS 17(2), 023504 (3 May 2018) https://doi.org/10.1117/1.JMM.17.2.023504
TOPICS: Photoresist materials, Etching, Scanning electron microscopy, Metals, Atomic layer deposition, Ion beams, Chromium, Photomasks, Gold, Lithography
J. Micro/Nanolith. MEMS MOEMS 17(2), 023505 (10 May 2018) https://doi.org/10.1117/1.JMM.17.2.023505
TOPICS: Absorption, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Tin, Zirconium, Metals, Lithography, Oxides, Chemical elements
J. Micro/Nanolith. MEMS MOEMS 17(2), 023506 (22 June 2018) https://doi.org/10.1117/1.JMM.17.2.023506
TOPICS: Atomic force microscopy, Line edge roughness, Photoresist processing, Photoresist developing, Image processing, Standards development, Photoresist materials, Optical lithography, Polymers, Pulmonary function tests
Metrology
J. Micro/Nanolith. MEMS MOEMS 17(2), 024001 (10 April 2018) https://doi.org/10.1117/1.JMM.17.2.024001
TOPICS: Composites, Graphene, Interfaces, Thermal effects, Field effect transistors, Anisotropy, Electronic components, Raman spectroscopy, Particles, Transmission electron microscopy
J. Micro/Nanolith. MEMS MOEMS 17(2), 024002 (15 June 2018) https://doi.org/10.1117/1.JMM.17.2.024002
TOPICS: Semiconducting wafers, Oxides, Transmission electron microscopy, Etching, Thin films, Ellipsometry, Electron microscopes, Wafer testing, Edge detection, Thin film devices
Microelectromechanical systems (MEMS)
J. Micro/Nanolith. MEMS MOEMS 17(2), 025001 (12 April 2018) https://doi.org/10.1117/1.JMM.17.2.025001
TOPICS: Electrodes, Luminescence, Lung cancer, Microscopes, Diffusion, Cancer, Glasses, Image processing, Solids, Optical lithography
J. Micro/Nanolith. MEMS MOEMS 17(2), 025002 (14 May 2018) https://doi.org/10.1117/1.JMM.17.2.025002
TOPICS: Microfluidics, 3D printing, Printing, Finite element methods, Computer aided design, Synthetic aperture radar, Numerical simulations, 3D modeling, Chemical analysis, Diffusion
J. Micro/Nanolith. MEMS MOEMS 17(2), 025003 (5 June 2018) https://doi.org/10.1117/1.JMM.17.2.025003
TOPICS: Liquids, Microfluidics, Capillaries, Fluid dynamics, Data modeling, Computational fluid dynamics, Image segmentation, Control systems, Instrument modeling, Water
Micro-optoelectromechanical systems (MOEMS)
J. Micro/Nanolith. MEMS MOEMS 17(2), 025501 (23 April 2018) https://doi.org/10.1117/1.JMM.17.2.025501
TOPICS: Antireflective coatings, Reflectivity, Coating, Silicon, Reflection, Liquids, Thin films, Etching, Polishing, Absorption
J. Micro/Nanolith. MEMS MOEMS 17(2), 025502 (13 June 2018) https://doi.org/10.1117/1.JMM.17.2.025502
TOPICS: Numerical simulations, Microfluidics, Protactinium, Interfaces, Microelectromechanical systems, 3D modeling, Capillaries, Fluid dynamics, Resistance, Solids
J. Micro/Nanolith. MEMS MOEMS 17(2), 025503 (30 June 2018) https://doi.org/10.1117/1.JMM.17.2.025503
TOPICS: Waveguides, Electrodes, Silicon, Brain, Tissue optics, Optical design, Optical fibers, Fabrication, Etching, In vivo imaging
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