Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 17 · NO. 3 | July 2018
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 17(3), 030101 (10 August 2018) https://doi.org/10.1117/1.JMM.17.3.030101
TOPICS: Monte Carlo methods, Stochastic processes, Photoresist developing, Physical sciences, Lead, Calibration, Lithography, Photoresist materials
Special Section on Novel Patterning Technologies
J. Micro/Nanolith. MEMS MOEMS 17(3), 031202 (22 August 2018) https://doi.org/10.1117/1.JMM.17.3.031202
TOPICS: Computer programming, Electron beam direct write lithography, Raster graphics, Electron beam lithography, Image compression, Logic, Detection and tracking algorithms, Semiconducting wafers, Data compression, Data processing
J. Micro/Nanolith. MEMS MOEMS 17(3), 031203 (22 August 2018) https://doi.org/10.1117/1.JMM.17.3.031203
TOPICS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Tomography, System on a chip, Chemistry, Scanning transmission electron microscopy, Transmission electron microscopy, Semiconducting wafers, 3D image processing
J. Micro/Nanolith. MEMS MOEMS 17(3), 031204 (6 September 2018) https://doi.org/10.1117/1.JMM.17.3.031204
TOPICS: Metals, Directed self assembly, Polymethylmethacrylate, Oxides, Copper, Dielectrics, Picosecond phenomena, Thermodynamics, Aluminum, Semiconducting wafers
J. Micro/Nanolith. MEMS MOEMS 17(3), 031205 (24 September 2018) https://doi.org/10.1117/1.JMM.17.3.031205
J. Micro/Nanolith. MEMS MOEMS 17(3), 031206 (14 September 2018) https://doi.org/10.1117/1.JMM.17.3.031206
TOPICS: Polymers, Printing, Liquids, Microfluidics, Optical lithography, Optical fibers, Nanocomposites, Additive manufacturing, Crystals, 3D printing
Lithography
J. Micro/Nanolith. MEMS MOEMS 17(3), 033501 (23 July 2018) https://doi.org/10.1117/1.JMM.17.3.033501
TOPICS: Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Molecules, Absorbance, Chemical reactions, Absorption, Spectroscopy, Electrodes
Metrology
J. Micro/Nanolith. MEMS MOEMS 17(3), 034001 (14 August 2018) https://doi.org/10.1117/1.JMM.17.3.034001
TOPICS: Semiconducting wafers, Data modeling, Metrology, Reactive ion etching, Diffractive optical elements, Optics manufacturing, Optical lithography, Scatterometry, Overlay metrology, Transmission electron microscopy
Microfabrication
J. Micro/Nanolith. MEMS MOEMS 17(3), 034501 (24 July 2018) https://doi.org/10.1117/1.JMM.17.3.034501
TOPICS: Microfluidics, CMOS sensors, Signal to noise ratio, Sensors, Microfluidic imaging, Imaging systems, Amplifiers, System integration, Signal detection, Integrated optics
Microelectromechanical systems (MEMS)
J. Micro/Nanolith. MEMS MOEMS 17(3), 035001 (10 July 2018) https://doi.org/10.1117/1.JMM.17.3.035001
TOPICS: Gyroscopes, Demodulation, Microelectromechanical systems, Signal detection, Neural networks, Temperature metrology, Evolutionary algorithms, Control systems, Data modeling, Lithium
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