H2S MEMS-based gas sensor

Ahmad Elshenety; Elwy E. El-Kholy; Ahmed F. Abdou; Mostafa Soliman; Mohsen M. Elhagry; Walaa S. Gado

doi:10.1117/1.JMM.18.2.025001

5 June 2019 H₂S MEMS-based gas sensor

Ahmad Elshenety, Elwy E. El-Kholy, Ahmed F. Abdou, Mostafa Soliman, Mohsen M. Elhagry, Walaa S. Gado

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 2, 025001 (June 2019). https://doi.org/10.1117/1.JMM.18.2.025001

Abstract

Background: Microelectromechanical systems are now one of the fastest growing engineering fields. We introduce a static gas sensor based on PolyMUMPs parallel plate actuators. The sensor exploits the pull-in phenomenon of the parallel plate actuators. The target gas is hydrogen sulfide (H₂S), which is a toxic gas and popular in laboratories, factories, and petroleum industry. Aim: Reach a gas sensor in which the gas can easily be detected by a simple electronic circuit using new polymer combinations. Approach: Two concentrations of H₂S (40 and 100 ppm) are used to test the ability of the sensor to capture the molecules of the gas. Gas injection process is done in a gas chamber and at ambient conditions (ambient temperature and pressure). Results: The two concentrations were successfully detected by the sensor and the electronic circuit verified the pull-in of the sensor. That was achieved using two different polymers (polypyrrole polymer and copper oxide–tin oxide/polypyrrole). Conclusions: The sensor successively detects H₂S gas with 40 and 100 ppm concentrations. Verifying the pull-in of the sensor using a simple detection circuit could help in quickly moving those sensors from prototype to product.

Citation Download Citation

Ahmad Elshenety, Elwy E. El-Kholy, Ahmed F. Abdou, Mostafa Soliman, Mohsen M. Elhagry, and Walaa S. Gado "H₂S MEMS-based gas sensor," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(2), 025001 (5 June 2019). https://doi.org/10.1117/1.JMM.18.2.025001

Received: 18 March 2019; Accepted: 13 May 2019; Published: 5 June 2019

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