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5 June 2019 H2S MEMS-based gas sensor
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Background: Microelectromechanical systems are now one of the fastest growing engineering fields. We introduce a static gas sensor based on PolyMUMPs parallel plate actuators. The sensor exploits the pull-in phenomenon of the parallel plate actuators. The target gas is hydrogen sulfide (H2S), which is a toxic gas and popular in laboratories, factories, and petroleum industry. Aim: Reach a gas sensor in which the gas can easily be detected by a simple electronic circuit using new polymer combinations. Approach: Two concentrations of H2S (40 and 100 ppm) are used to test the ability of the sensor to capture the molecules of the gas. Gas injection process is done in a gas chamber and at ambient conditions (ambient temperature and pressure). Results: The two concentrations were successfully detected by the sensor and the electronic circuit verified the pull-in of the sensor. That was achieved using two different polymers (polypyrrole polymer and copper oxide–tin oxide/polypyrrole). Conclusions: The sensor successively detects H2S gas with 40 and 100 ppm concentrations. Verifying the pull-in of the sensor using a simple detection circuit could help in quickly moving those sensors from prototype to product.
© 2019 Society of Photo-Optical Instrumentation Engineers (SPIE) 1932-5150/2019/$25.00 © 2019 SPIE
Ahmad Elshenety, Elwy E. El-Kholy, Ahmed F. Abdou, Mostafa Soliman, Mohsen M. Elhagry, and Walaa S. Gado "H2S MEMS-based gas sensor," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(2), 025001 (5 June 2019).
Received: 18 March 2019; Accepted: 13 May 2019; Published: 5 June 2019

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