journal of micro nanolithography mems and moems
VOL. 2 · NO. 4 | October 2003
CONTENTS
Editorial
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1621873
SPECIAL SECTION ON SURFACE MICROMACHINING
Jeffry Sniegowski, James Smith
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1616574
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610477
TOPICS: Etching, Silicon, Waveguides, Reactive ion etching, Deep reactive ion etching, Plasma, Photomasks, Custom fabrication, Anisotropic etching, Ions
Ian Foulds, Maria Trinh, Sam Hu, Steven Liao, Robert Johnstone, M. Parameswaran DUPLICATE RECORD - Do Not U
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610476
TOPICS: Switches, Microelectromechanical systems, Switching, Microfabrication, Relays, Mirrors, Reliability, Scanning electron microscopy, Microsystems, Optical switching
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610478
TOPICS: Silicon carbide, Microelectromechanical systems, Silicon, Scanning electron microscopy, Low pressure chemical vapor deposition, Chemical vapor deposition, Nanoelectromechanical systems, Crystals, Sensors, Actuators
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610474
TOPICS: Reflectivity, Vertical cavity surface emitting lasers, Silicon, Optical microcavities, Mirrors, Optical filters, Electronic filtering, Control systems, Absorption, Tunable filters
Nimit Chomnawang, Jeong Lee, Wendell Davis
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610475
TOPICS: Photoresist materials, 3D modeling, Polymers, Resistance, Surface micromachining, Electroplating, Copper, Reactive ion etching, Capacitance, Electrical engineering
SPECIAL SECTION ON MICRO-OPTICS FOR PHOTONIC NETWORKS
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1616575
Hans Thiele, Christiane Gimkiewicz, Michael Gale, Jürgen Söchtig, S. Westenhöfer, S. Mahmud, Christian Zschokke
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610479
TOPICS: Waveguides, Dense wavelength division multiplexing, Sensors, Tantalum, Refractive index, Sol-gels, Optical design, Signal detection, Diffraction gratings, Tunable lasers
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610482
TOPICS: Waveguides, Directional couplers, Wave propagation, Photonic crystals, Finite-difference time-domain method, Silicon, Dispersion, Dielectrics, Radio propagation, Electromagnetic radiation
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610480
TOPICS: Waveguides, Optical networks, Integrated optics, Dielectrics, Photonic crystals, Finite-difference time-domain method, Optical interconnects, Silicon, Magnetism, Optical design
Alexei Glebov, Lidu Huang, Shinegori Aoki, Michael Lee, Kishio Yokouchi
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610481
TOPICS: Beam propagation method, Waveguides, Microlens array, Lens design, Channel waveguides, Photonic integrated circuits, Light wave propagation, Dense wavelength division multiplexing, Interfaces, Wave propagation
Saurabh Lohokare, Dennis Prather, Thomas Dillon, Anita Sure, Oleg Sulima, Jeffery Cox, Michael Mauk
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1607967
TOPICS: Avalanche photodetectors, Gallium, Antimony, Diffractive optical elements, Polymers, Aluminum, Zinc, Diffusion, Indium gallium arsenide antimonide, Resistance
MASKLESS LITHOGRAPHY
Kin Foong Chan, Zhiqiang Feng, Ren Yang, Akihito Ishikawa, WenHui Mei
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1611182
TOPICS: Digital micromirror devices, Maskless lithography, Lithography, Microlens array, Glasses, Photomasks, Scanning electron microscopy, Photoresist materials, Microelectromechanical systems, LCDs
INTEGRATED MICROFLUIDIC SYSTEMS
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1610483
TOPICS: Microfluidics, Silicon, Genetics, System integration, Liquids, Polymers, Biological research, Glasses, Etching, Statistical analysis
MICRO-OPTICAL COMPONENTS
Seok-Min Kim, Dongmook Kim, Shinill Kang
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) doi:10.1117/1.1611183
TOPICS: Microlens array, Microlens, Surface roughness, Silicon, Ultraviolet radiation, Control systems, Optical properties, Optical components, Nickel, Metals
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