Journal of Micro/Nanolithography, MEMS, and MOEMS
VOL. 2 · NO. 4 | October 2003
CONTENTS
Editorial
SPECIAL SECTION ON SURFACE MICROMACHINING
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610477
TOPICS: Etching, Silicon, Waveguides, Reactive ion etching, Deep reactive ion etching, Plasma, Photomasks, Custom fabrication, Anisotropic etching, Ions
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610476
TOPICS: Switches, Microelectromechanical systems, Switching, Microfabrication, Relays, Mirrors, Reliability, Scanning electron microscopy, Microsystems, Optical switching
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610478
TOPICS: Silicon carbide, Microelectromechanical systems, Silicon, Scanning electron microscopy, Low pressure chemical vapor deposition, Chemical vapor deposition, Nanoelectromechanical systems, Crystals, Sensors, Actuators
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610474
TOPICS: Reflectivity, Vertical cavity surface emitting lasers, Silicon, Optical microcavities, Mirrors, Optical filters, Electronic filtering, Control systems, Absorption, Tunable filters
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610475
TOPICS: Photoresist materials, 3D modeling, Polymers, Resistance, Surface micromachining, Electroplating, Copper, Reactive ion etching, Capacitance, Electrical engineering
SPECIAL SECTION ON MICRO-OPTICS FOR PHOTONIC NETWORKS
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610479
TOPICS: Waveguides, Dense wavelength division multiplexing, Sensors, Tantalum, Refractive index, Sol-gels, Optical design, Signal detection, Diffraction gratings, Tunable lasers
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610482
TOPICS: Waveguides, Directional couplers, Wave propagation, Photonic crystals, Finite-difference time-domain method, Silicon, Dispersion, Dielectrics, Radio propagation, Electromagnetic radiation
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610480
TOPICS: Waveguides, Optical networks, Integrated optics, Dielectrics, Photonic crystals, Finite-difference time-domain method, Optical interconnects, Silicon, Magnetism, Optical design
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610481
TOPICS: Beam propagation method, Waveguides, Microlens array, Lens design, Channel waveguides, Photonic integrated circuits, Light wave propagation, Dense wavelength division multiplexing, Interfaces, Wave propagation
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1607967
TOPICS: Avalanche photodetectors, Gallium, Antimony, Diffractive optical elements, Polymers, Aluminum, Zinc, Diffusion, Indium gallium arsenide antimonide, Resistance
MASKLESS LITHOGRAPHY
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1611182
TOPICS: Digital micromirror devices, Maskless lithography, Lithography, Microlens array, Glasses, Photomasks, Scanning electron microscopy, Photoresist materials, Microelectromechanical systems, LCDs
INTEGRATED MICROFLUIDIC SYSTEMS
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1610483
TOPICS: Microfluidics, Silicon, Genetics, System integration, Liquids, Polymers, Biological research, Glasses, Etching, Statistical analysis
MICRO-OPTICAL COMPONENTS
J. Micro/Nanolith. MEMS MOEMS 2(4), (1 October 2003) https://doi.org/10.1117/1.1611183
TOPICS: Microlens array, Microlens, Surface roughness, Silicon, Ultraviolet radiation, Control systems, Optical properties, Optical components, Nickel, Metals
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